Research on Measurement Accuracy of the Double-Channel Microwave Power Sensors Based on an MEMS Cantilever Beam

作     者：WANG Debo WU Lele LI Longfei DAI Ruiping WANG Debo;WU Lele;LI Longfei;DAI Ruiping

作者机构：Nanjing University of Posts and Telecommunication 

出 版 物：《Chinese Journal of Electronics》 (电子学报(英文))

年 卷 期：2019年第28卷第5期

页      面：916-919页

核心收录：

学科分类：0808[工学-电气工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 0701[理学-数学] 

基　　金：supported by the National Natural Science Foundation of China(No.61704086) the Province Natural Science Foundation of Jiangsu(No.BK20140890) the Open Research Fund of Key Laboratory of MEMS of Ministry of Education,Southeast University(No.3206005302) the Scientific Research Foundation of Nanjing University of Posts and Telecommunications(No.NY215139,No.NY217039) 

主　　题：Thermopile-based power sensor MEMS cantilever Double-channel Measurement accuracy 

摘      要：A thermopile-based microwave power sensor and a double-channel microwave power sensor are compared in order to research the measurement accuracy of microwave power. The relationship of the displacement of MEMS cantilever beam with the measured microwave power is researched, and the reason that the microwave power consumed by the MEMS cantilever cannot be ignored at low power level is *** ratio of microwave power consumed by the MEMS cantilever with the microwave frequency is obtained,and the measured results show that the percentage is 51.96%@8 GHz, 52.31%@10 GHz and 55.11%@12 GHz on the average, respectively. There is an important reference value to achieve the accurate microwave power measurement of the double-channel microwave power sensors.