Enhancement of the orientation and adhesion of Al films on LiNbO_3 with Ni underlayer

作     者：LI Dongmei PAN Feng NIU Jiebin LIU Ming 

作者机构：Laboratory of Advanced Materials Department of Materials Science and Engineering Tsinghua University Beijing 100084 China Institute of Chemistry and Chemical Engineering of Xinjiang University Wulumuqi 830046 China Institute of Microelectronics Chinese Academy of Sciences Beijing 100029 China 

出 版 物：《Rare Metals》 (稀有金属（英文版）)

年 卷 期：2005年第24卷第4期

页      面：363-369页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：This work was financially supported by the National High-technology Project of China (No. 2002AA325040)  the National Natural Science foundation of China (No. 50325105  50371040) and the Key Grant of Chinese Ministry of Education (No. 0303). 

主　　题：metal materials Al/Ni films electron-beam evaporation microstructure surface acoustic wave 

摘      要：Al/Ni films were deposited on 128° Y-X LiNbO3 substrates by e-beam deposition. The influence of Ni underlayer on the microstructure, adhesion and resistivity of the Al/Ni films was investigated. It was found that Al films deposited on Ni underlayer thinner than 5 nm possessed strong texture. The textured Al/Ni films had a superior adhesion. Their resistivity decreased after annealing treatment at 200℃ for 30 min. With the textured Al/Ni films, a 2,30 GHz-range image-impedance connection SAW （Surface Acoustic Wave） filter was successfully fabricated.