Properties of Evaporated Si_(1-x)Sn_x and Si_(1_x)Sn_x:H Amorphous Alloys

作     者：M.Vergnat M.Gerl 

作者机构：Laboratoire de Métallurgie Physique et Science des Maériaux (U.R.A.au C.N.R.S.No. 155) Universite de Nancy 1 France 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：1993年第9卷第2期

页      面：79-88页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

主　　题：amorphous alloy evaporation hydrogenation 

摘      要：Amorphous Si_(1-x)Sn_x alloys have been prepared by co-evaporation onto substrates maintained at liquid nitrogen temperature. Their atomic structure is investigated using density measurements, scanning high-energy electron diffraction and Mossbauer spectroscopy. The optical and electrical properties are reported. Then, a method to hydrogenate the films during the evaporation process is described and applied to the preparation of amorphous semiconductors from pure silicon to pure tin. Finally, multilayers of type Si / Si:H / ... or Si:H / Si:D / ... are studied. The modulation of hydrogen is shown by low-angle neutron scattering and measurements of hydrogen diffusivity are presented.