Secondary electron yield suppression using millimeter-scale pillar array and explanation of the abnormal yield–energy curve
Secondary electron yield suppression using millimeter-scale pillar array and explanation of the abnormal yield–energy curve作者机构:School of Electronic and Information Engineering Xi'an Jiaotong University Xi'an 710049 China Key Laboratory for Physical Electronics and Devices of the Ministry of Education School of Electronic and Information Engineering Xi'an Jiaotong University Xi'an 710049 China State Key Laboratory of Electrical Insulation and Power Equipment School of Electrical Engineering Xi'an Jiaotong University Xi'an 710049 China National Key Laboratory of Science and Technology on Space Microwave China Academy of Space Technology Xi'an 710100 China
出 版 物:《Chinese Physics B》 (中国物理B(英文版))
年 卷 期:2019年第28卷第7期
页 面:479-485页
核心收录:
学科分类:080901[工学-物理电子学] 0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学]
基 金:Project supported by the National Natural Science Foundation of China(Grant Nos.U1832190 61501364 U1537211 and 11705142)
主 题:secondary electron emission pillar array total secondary electron yield suppression
摘 要:The phenomenon of secondary electron emission is of considerable interest in areas such as particle accelerators and on-board radio frequency(RF) *** secondary electron yield(TSEY) is a parameter that is frequently used to describe the secondary electron emission capability of a *** has been widely recognized that the TSEY *** electron energy curve has a single-hump ***, the TSEY–energy curve with a double-hump shape was also observed experimentally-this anomaly still lacks *** this work, we explain this anomaly with the help of a millimetre-scale(mm-scale) silver pillar array fabricated by three-dimensional(3 D) printing *** TSEY–energy curve of this pillar array as well as its flat counterpart is obtained using sample current *** measurement results show that for the considered primary electron energy(40–1500 eV), the pillar array can obviously suppress TSEY,and its TSEY–energy curve has an obvious double-hump *** Monte Carlo simulations and electron beam spot size measurements, we successfully attribute the double-hump effect to the dependence of electron beam spot size on the primary electron *** observations of this work may be of help in determining the TSEY of roughened surface with characteristic surface structures comparable to electron beam spot *** also experimentally confirms the TSEY suppression effect of pillar arrays.