Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages
作者机构：State Key Laboratory of Digital Manufacturing Equipment and Technology Huazhong University of Science and Technology Wuhan 430074 China
出 版 物：《Frontiers of Mechanical Engineering》 (机械工程前沿（英文版）)
年 卷 期：2019年第14卷第3期
页 面：255-272页
核心收录：
基 金：National Science and Technology Major Project of China (Grant Nos. 2009ZX02204- 006 and 2017ZX02101007-002) the National Natural Science Foundation of China (Grant Nos. 51435006 and 51675195)
主 题：nano-precision positioning stage analysis and design structural and dynamic parameters dynamic accuracy systematic modeling
摘 要：Nano-precision positioning stages are characterized by rigid-flexible coupling systems. The complex dynamic characteristics of mechanical structure of a stage, which are determined by structural and dynamic parameters, exert a serious influence on the accuracy of its motion and measurement. Systematic evaluation of such influence is essential for the design and improvement of stages. A systematic approach to modeling the dynamic accuracy of a nano-precision positioning stage is developed in this work by integrating a multi-rigid-body dynamic model of the mechanical system and measurement system models. The influence of structural and dynamic parameters, including aerostatic bearing configurations, motion plane errors, foundation vibrations, and positions of the acting points of driving forces, on dynamic accuracy is investigated by adopting the H-type configured stage as an example. The approach is programmed and integrated into a software framework that supports the dynamic design of nano-precision positioning stages. The software framework is then applied to the design of a nano-precision positioning stage used in a packaging lithography machine.
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