Fabrication of sapphire rib waveguides using a femtosecond laser

作     者：WANG Jue TAO Qing HU Chen ZHAI Zhong-sheng CHENG Jian LIU Dun 王珏;陶青;胡晨;翟中生;成健;刘顿

作者机构：School of Mechanical EngineeringHubei University of TechnologyWuhan430068China Hubei Key Laboratory of Modern Manufacturing Quantity EngineeringSchool of Mechanical EngineeringHubeiUniversity of TechnologyWuhan430068China1 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2019年第15卷第3期

页      面：190-194页

核心收录：

学科分类：080901[工学-物理电子学] 07[理学] 0809[工学-电子科学与技术（可授工学、理学学位）] 070205[理学-凝聚态物理] 08[工学] 080401[工学-精密仪器及机械] 080501[工学-材料物理与化学] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：supported by the Hubei Provincial Natural Science Foundation of China(No.ZRMS2017001448) the Doctor Research Funding of Hubei University of Technology(No.00026) the "Advanced Manufacturing Technology and Equipment" Collaborative Innovation Center Open Research Fund of Hubei University of Technology(No.1201501) the Green Industry Technology Leading Project of Hubei University of Technology(No.CPYF2017002) 

主　　题：FD length Fabrication of sapphire rib waveguides using a femtosecond laser BPM 

摘      要：We demonstrate a method for fabricating sapphire rib waveguides with femtosecond laser micromachining technology. Finite difference beam propagation method(FD-BPM) is applied to design sapphire rib waveguides. We explore the process of etching on a sapphire substrate surface via direct laser ablation. Rib waveguides that satisfies the dimensions of our design were fabricated. Actual light propagation performance is tested, and with the cut-back method, the insertion loss of 2.9±0.5 dB/cm is measured.