Crystallization of NiTi shape memory alloy sputtering-deposition film

作     者：QIU Ping shan(邱平善) SONG Run bin(宋润滨) HUANG Wei xin(黄渭馨) LI Yun xi(李运稀) WANG Gui song(王桂松) YU Wei dong(于伟东) 

作者机构：Harbin Univ Sci & Technol Coll Mech & Power Engn Harbin 150080 Peoples R China 

出 版 物：《中国有色金属学会会刊：英文版》 (Transactions of Nonferrous Metals Society of China)

年 卷 期：2000年第10卷第3期

页      面：320-323页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

主　　题：sputtering deposition films crystallization shape memory alloys 

摘      要：The crystallization of NiTi shape memory alloy sputter deposition film in the course of sputtering deposition and that after heat treated were studied. The relationship between the process factors, such as substrate type, temperature, as well as the crystallization when heat treated after plating was investigated. The results show that a new phase precipitates during heat treatment after sputtering deposition and the degree of crystallization among different layers and the stress in grains are obviously different.