Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films
Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films作者机构：Natonal Physical LaboratoryCouncil of Scientific and Industrial Research Indian Institute of Technology Okayama University of Science
出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)
年 卷 期：2010年第26卷第11期
页 面：986-990页
核心收录：
学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学]
主 题：Electron microscopy Nanomaterials ZnO RF sputtering Photoluminescence Spectroscopy Electron paramagnetic resonance
摘 要：Zinc oxide （ZnO） thin films were grown on silicon substrate by RF （radio frequency） magnetron *** topography of these films exhibited a nanostructured granular appearance with the size of individual grains between 50 to 100 *** cross-sectional electron micrographs revealed columnar grains in the form of aggregated nanorods/wires with length of about 500 nm,similar to the thickness of these thin films of ZnO nucleated and grown vertically on the silicon *** resolution lattice scale imaging using high resolution transmission electron microscope （HRTEM） elucidated the single crystalline 1010 planes of hexagonal-ZnO constituting the columnar grains with the individual nanorod diameter between 3 and 4 *** photoluminescence measurements showed the prominent emission peak at around 460 nm for the blue band,normally attributed to intrinsic defects in particular interstitial zinc （Zn）.These films were further characterized by X-ray diffraction （XRD）,Fourier transform infrared spectroscopy （FTIR）,Raman spectroscopy and electron paramagnetic resonance （EPR） to evaluate various aspects on preferred growth orientations,band structures and vibrational modes originated in such fascinating nano-grained thin films of *** present investigations inferred that these films are advantageous in various potential applications for fabricating nano-scaled devices.
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