Numerical simulation of nanoparticle pattern fabricated by electrostatic spray deposition

作     者：Wei Wei Zhaolin Gu Sheng Wang Takeshi Fukuda Kiwamu Kase Jungmyoung Ju Yutaka Yamagata Yusuke Tajima 

作者机构：Xi'an Jiaotong University RIKEN Institute2-1 HirosawaWako CitySaitama 351-0198Japan Saitama University255 Shimo-OkuboSakura-kuSaitama 338-8570Japan 

出 版 物：《Particuology》 (颗粒学报（英文版）)

年 卷 期：2013年第11卷第1期

页      面：20-24页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：the IPA Program of RIKEN Institute and Japan Society for the Promotion of Science(No. 23760070) for funding this research 

主　　题：Nanoparticle pattern Electrospray deposition Deposition characteristics Lagrangian model 

摘      要：Electrospray deposition （ESD） as a patterning method of nanoparticles deposited on a substrate has attracted much attention due to several advantages over other methods. However, obtaining an optimum ESD processing condition for nanoparticle pattern relies much on trial experiments because of the lack of reliable numerical simulation. In this study, the deposition characteristics of nanoparticle generated by electrospray were investigated by using a three-dimensional Lagrangian model. Three important process parameters, including solution dielectric constant, applied voltage and surface charge density on mask were considered by fixing the geometrical parameters of the ESD device. Simulation result showed that under the condition of without a mask, the spray diameter increases with increasing solvent dielectric constant, and higher applied voltage makes the spray area wider. Controllability of focusing by changing surface charge density on the mask was confirmed： higher surface charge density on the mask results in more focused deposition. Validity of the numerical simulation developed in this study was verified by comnarison with exoerimental data.