Fabrication of YBCO superconducting microarray by sol-gel process using photosensitive metal chelates

作     者：ZHAO GaoYang JIA JiQiang JIANG Fen LEI Li MA JunShan 

作者机构：School of Materials Science and EngineeringXi'an University of Technology Advanced Materials Analysis and Test CenterXi'an University of Technology 

出 版 物：《Science China(Technological Sciences)》 (中国科学（技术科学英文版）)

年 卷 期：2013年第56卷第6期

页      面：1409-1414页

核心收录：

学科分类：0810[工学-信息与通信工程] 080801[工学-电机与电器] 0808[工学-电气工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0702[理学-物理学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：supported by the National Natural Science Foundation of China (Grant No. 51072163) the Specialized Research Fund for the Doctoral Program of Higher Education (Grant No. 20096118110002) the Special Funds for the Construction of Key Disciplines Project of Shanxi Province 

主　　题：YBCO 凝胶工艺 超导芯片 金属螯合物 溶胶 感光 制备 紫外线照射 

摘      要：We used yttrium acetate, barium acetate, and copper acetate as the starting materials, benzalacetone (BzAcH) as chemical modifier, and methanol (MEOH) as solvent to synthesize a stable fluorine-free YBCO precursor sol. The coated YBCO gel film using this precursor sol exhibited photosensitivity to UV irradiation at a wavelength of 330 nm. After the subsequent exposing, the YBCO gel film showed a decreased solubility in several organic solvents. Based on the photosensitivity of the YBCO/BzAcH gel film, YBCO superconducting microarray with the pitch of 5 μm was fabricated by irradiating the gel film with UV light through a mask, followed by leaching the unirradiated area in a mixture solvent of methanol and n-butyl alcohol with the volume ratio of 1:1. After proper heat treatment the x-ray diffraction result showed that the as-prepared arrays were highly c-axis oriented and with a high T c by this new photosensitive sol-gel process.