A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor
A Sputtering Deposition of Al Enhances the Output Reproducibility in a Conducting Rubber Force Sensor作者机构：Department of Electrical and Computer Engineering Akashi College of Technology Akashi Hyogo Japan
出 版 物：《Journal of Sensor Technology》 (传感技术（英文）)
年 卷 期：2016年第6卷第3期
页 面：46-55页
学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）]
主 题：Conducting Rubber Force Sensor Electrode Magnetron Sputtering Reproducibility
摘 要：Compressive force sensors or pressure sensors are indispensable to tactile sensors in humanoid robots. It is investigated that low-cost electro-conducting rubber sheets are applied to the force sensor, of which the biggest problem is its poor reproducibility. It was found that the aluminum deposition by a vacuum evaporation method shows excellent characteristics but suffers deterioration by a radiation heating effect. The aluminum electrode was deposited by a sputtering method, known to have an advantage of a low-temperature method, and the reproducibility of the output was improved.
维普期刊数据库