Study on the Method for Measuring Nano-Displacement

作     者：李银祥 

作者机构：Measuring Center Wuhan University of Technology Wuhan 430070 China 

出 版 物：《Journal of Wuhan University of Technology(Materials Science)》 (武汉理工大学学报（材料科学英文版）)

年 卷 期：2001年第16卷第3期

页      面：70-72页

核心收录：

学科分类：08[工学] 0804[工学-仪器科学与技术] 

基　　金：Funded by State "863"Project Project (863-715-003-0040-2) 

主　　题：nanometer displacement measurement 

摘      要：A new method for measuring nano-displacement is discussed. Theresolution of shift is as far as 1 nm. The principle of quantumtunneling effects was used to design the instrument. With the tunnelbetween the sample and the needlepoint and under the control ofclosed loop system, the instrument works at constant current mode, sothat the high precision displacement can be got.