Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding
作者机构：Laboratoire IMSUniversity of BordeauxUMR 5218ENSCBP16 avenue Pey Berland33607 PessacFrance Centre National de Recherche ScientifiqueUniversity of BordeauxSolvayLOFUMR 525833600 PessacFrance Centre de Recherche Paul PascalUniversity of BordeauxAvenue Schweitzer33600 PessacFrance
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2018年第4卷第1期
页 面：270-277页
核心收录：
学科分类：081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 070305[理学-高分子化学与物理] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学]
基 金：This work was supported by the LabEx AMADEus(ANR-10-LABX-42) the framework of IdEx Bordeaux(ANR-10-IDEX-03-02) that is,the Investissements d’Avenir programme of the French government managed by the Agence Nationale de la Recherche We thank Solvay and Région Nouvelle Aquitaine for funding(project MEMSOrga)
摘 要：In view of the extensive increase of flexible devices and wearable electronics,the development of polymer microelectro-mechanical systems(MEMS)is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly ***,polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart,and innovative microfabrication techniques are still *** show in the present work an emerging and versatile microfabrication method to produce arbitrary organic,spatially resolved multilayer micro-structures,starting from dilute inks,and with possibly a large choice of *** approach consists in extending classical microfluidic pervaporation combined with MIcro-Molding In *** illustrate the potential of this technique,bilayer polymer double-clamped resonators with integrated piezoresistive readout have been fabricated,characterized,and applied to humidity *** present work opens new opportunities for the conception and integration of polymers in MEMS.
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