金刚石膜生长过程原位光发射谱研究

作     者：崔景彪 方容川 

作者机构：中国科技大学物理系合肥230026 中国科技大学结构分析开放实验室合肥230026 

出 版 物：《物理化学学报》 (Acta Physico-Chimica Sinica)

年 卷 期：1996年第12卷第2期

页      面：102-104页

核心收录：

学科分类：081704[工学-应用化学] 07[理学] 08[工学] 0817[工学-化学工程与技术] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 070301[理学-无机化学] 0702[理学-物理学] 

基　　金：国家863高技术发展计划资助 

主　　题：光发射谱 CVD 金刚石膜 

摘      要：In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 *** ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.