A novel latch-up free SCR-LDMOS with high holding voltage for a power-rail ESD clamp
A novel latch-up free SCR-LDMOS with high holding voltage for a power-rail ESD clamp作者机构:National ASIC System Engineering Research CenterSoutheast University
出 版 物:《Journal of Semiconductors》 (半导体学报(英文版))
年 卷 期:2013年第34卷第1期
页 面:53-57页
核心收录:
学科分类:080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程(可授工学、理学学位)] 080502[工学-材料学]
基 金:Project supported by the Natural Science Foundation of Jiangsu Province (No.BK2011059) the Program for New Century Excellent Talent in University (No.NCET-10-0331)
主 题:ESD protection ESD robustness SCR-LDMOS latch-up holding voltage
摘 要:The low snapback holding voltage of the SCR-LDMOS device makes it susceptible to latch-up failure,when used in power-rail ESD(electro-static discharge) clamp *** order to eliminate latch-up risk,this work presents a novel SCR-LDMOS structure with an N-type implantation layer to achieve a 17 V holding voltage and a 5.2 A second breakdown *** device has been validated using TLP measurement analysis and is applied to a power-rail ESD clamp in half-bridge driver ICs.