Controlled fabrication of nanoscale wrinkle structure by fluorocarbon plasma for highly transparent triboelectric nanogenerator

作     者：Xiaoliang Cheng Liming Miao Zongming Su Haotian Chen Yu Song Xuexian Chen Haixia Zhang 

作者机构：National Key Laboratory of Nano/Micro Fabrication TechnologyInstitute of MicroelectronicsPeking UniversityBeijing 100871China 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2017年第3卷第1期

页      面：414-422页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：This work is supported by the National Natural Science Foundation of China(Grant No.61674004 and 91323304) National Key R&D Project from Ministry of Science and Technology,China(2016YFA0202701) the Beijing Science&Technology Project(Grant No.D151100003315003) the Beijing Natural Science Foundation of China(Grant No.4141002) 

主　　题：fluorocarbon plasma nanostructure fabrication triboelectric nanogenerator wrinkle structure 

摘      要：In this paper,we report a novel nanoscale wrinkle-structure fabrication process using fluorocarbon plasma on poly(dimethylsiloxane)(PDMS)and Solaris *** with wavelengths of hundreds of nanometers were obtained on these two materials,showing that the fabrication process was universally *** varying the plasma-treating time,the wavelength of the wrinkle structure could be *** transparent membranes with wrinkle patterns were obtained when the plasmatreating time was o125 *** transmittances of these membranes were 490%in the visible region,making it difficult to distinguish them from a flat *** deposited fluorocarbon polymer also dramatically reduced the surface energy,which allowed us to replicate the wrinkle pattern with high precision onto other membranes without any surfactant *** combined advantages of high electron affinity and high transparency enabled the fabricated membrane to improve the performance of a triboelectric *** nanoscale,single-step,and universal wrinkle-pattern fabrication process,with the functionality of high transparency and ultra-low surface energy,shows an attractive potential for future applications in microand nanodevices,especially in transparent energy harvesters.