Influence of Annealing on Crystal Structure and Properties of SrBi_(2)Ta_(2)O_(9) Thin Films Prepared by Pulse Laser Deposition
作者机构:State Key Laboratory of Functional Materials for InformationShanghai Institute of MetallurgyChinese Academy of SciencesShanghai 200050
出 版 物:《Chinese Physics Letters》 (中国物理快报(英文版))
年 卷 期:1996年第13卷第12期
页 面:934-936页
核心收录:
学科分类:08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 080502[工学-材料学] 0704[理学-天文学]
主 题:ferroelectric annealing film
摘 要:The perovskite-like SrBi_(2)Ta_(2)O_(9)(SBT)thin films have been fabricated on Si/SiO_(2)/Ti/Pt substrate by pulse laser *** crystallization and ferroelectric property were clearly dependent on the annealing time and *** SBT thin film with fine grain size and well-saturated square hysteresis loop was obtained after annealing at 750℃ for *** ferroelectric properties were obtained from the SBT film annealed under this condition;Pr and Ec were 8.4μC/cm^(2) and 57kV/cm,respectively.