Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM
Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM作者机构：School of Electrical Engineering and Telecommunications University of New South Wales Kensington NSW 2052 Australia
出 版 物：《Frontiers of Optoelectronics》 (光电子前沿（英文版）)
年 卷 期：2018年第11卷第1期
页 面：53-59页
核心收录：
学科分类：0808[工学-电气工程] 070207[理学-光学] 0809[工学-电子科学与技术（可授工学、理学学位）] 07[理学] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0824[工学-船舶与海洋工程] 082401[工学-船舶与海洋结构物设计制造] 0702[理学-物理学]
主 题：atomic force microscopy (AFM) siliconwaveguide silicon coupler high aspect ratio (HAR) nanotips
摘 要：This paper reviews an initial achievement of our group toward the development of on-chip parallel high-speed atomic force microscopy（HS-AFM）.A novel AFM approach based on silicon waveguide cantilever displacement sensor is *** displacement sensing approach uniquely allows the use of nano-scale wide cantilever that has a high resonance frequency and low spring constant desired for on-chip parallel *** approach consists of low loss silicon waveguide with nano-gap,highly efficient misalignment tolerant coupler,novel high aspect ratio（HAR）sharp nano-tips that can be integrated with nano-scale wide cantilevers and electrostatically driven nano-cantilever *** simulation results show that the displacement sensor with optical power responsivity of 0.31%/nm and AFM cantilever with resonance frequency of 5.4 MHz and spring constant of 0.21 N/m are achievable with the proposed *** developed silicon waveguide fabrication method enables silicon waveguide with 6 and 7.5 dB/cm transmission loss for TE and TM modes,respectively,and formation of 13 nm wide nano-gaps between silicon *** coupler demonstrates misalignment tolerance of ±1.8 μm for 5μm spot size lensed fiber and coupling loss of 2.12 dB/facet for standard cleaved single mode fiber without compromising other *** nano-tips with apex radius as small as 2.5 nm and aspect ratio of more than 50 has been enabled by the development of novel HAR nanotip fabrication *** of the HAR tips onto an array of 460 nm wide cantilever beam has also been demonstrated.
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