Finite-element analysis of scattering parameters of surface acoustic wave bandpass filter formed on barium titanate thin film

作     者：Pavel E.Timoshenko Valery V.Kalinchuk Vladimir B.Shirokov 

作者机构：Department of NanotechnologySouthern Federal UniversityRostov-on-DonRussia Southern Scientific Center RASRostov-on-DonRussia 

出 版 物：《International Journal of Smart and Nano Materials》 (国际智能和纳米材料杂志（英文）)

年 卷 期：2018年第9卷第2期

页      面：88-98,I0002页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：This work was supported by the the Russian Science Foundation[14-19-01676] 

主　　题：SAW filters ferroelectrics thin films finite element method(FEM) COMSOL 

摘      要：The frequency dependence of scattering parameters of interdigital surface acoustic wave transducers placed on ferroelectric barium titanate(BaTiO_(3))epitaxial film in c-phase coated over magnesium oxide has been studied using the finite-element method(FEM)approach along with the perfectly matched layer(PML)*** interdigital transducer which has a comb-like structure with aluminum electrodes excites the mechanical *** distance between the fingers allows tuning the frequency properties of the wave *** magnesium oxide is taken as the *** two-dimensional model of two-port surface acoustic wave filter is created to calculate scattering parameters and to show how to design the fixture in COMSOL_(TM).Some practical computational challenges of finite element modeling of SAW devices in COMSOL_(TM)are *** effect of lattice misfit strain on acoustic properties of heterostructures of BaTiO_(3)epitaxial film in c-phase at room temperature is discussed in present article for two lowfrequency surface acoustic resonances.