Growth of 4＂ diameter polycrystailine diamond wafers with high thermal conductivity by 915 MHz microwave plasma chemical vapor deposition

作     者：A F POPOVICH V G RALCHENKO V K BALLA A K MALLIK A A KHOMICH A P BOLSHAKOV D N SOVYK E E ASHKINAZI V Yu YUROV 

作者机构：Institute of Radio Engineering and Electronics of Russian Academy of Sciences Fryazino 141190 Russia General Physics Institute of Russian Academy of Sciences Moscow 119991 Russia Harbin Institute of Technology Harbin 150001 People's Republic of China National Research Nuclear University MEPhI Moscow 115409 Russia Central Glass and Ceramic Research Institute Kolkata 700 032 India 

出 版 物：《Plasma Science and Technology》 (等离子体科学和技术（英文版）)

年 卷 期：2017年第19卷第3期

页      面：93-97页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：supported by the Russian Ministry of Education and Science(RMES),Agreement No.14.613.21.0021,unique ID No.RFMEFI61314X0021 the Department ofScience & Technology(DST),India,grant No.GAP0246 under the joint RMES-DST Research Collaboration Agreement 'Development of large size polycrystalline CVD diamond material for optical windows and support rods in high power microwave tubes' 

主　　题：thermal conductivity polycrystalline diamond microwave plasma chemical vapordeposition Raman spectroscopy 

摘      要：Polycrystalline diamond（PCD） films 100 mm in diameter are grown by 915 MHz microwave plasma chemical vapor deposition（MPCVD） at different process parameters,and their thermal conductivity（TC） is evaluated by a laser flash technique（LFT） in the temperature range of230-380 *** phase purity and quality of the films are assessed by micro-Raman spectroscopy based on the diamond Raman peak width and the amorphous carbon（a-C） presence in the *** and increasing dependencies for TC with temperature are found for high and low quality samples,***,as high as 1950 ± 230 W m-1 K-1 at room temperature,is measured for the most perfect material.A linear correlation between the TC at room temperature and the fraction of the diamond component in the Raman spectrum for the films is established.