Wear Resistance of TiN_x/CF_y Coatings Deposited by RF Magnetron Co-Sputtering

作     者：Lin Zhu Jinwu Wang Zhuang Liu 

作者机构：College of EngineeringNortheast Agricultural University School of Light IndustryHarbin University of Commerce 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2015年第31卷第12期

页      面：1207-1216页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：supported by the National Science Foundation for Young Scholars of China (Grant Nos.51302054 and 51205056) the Natural Science Foundation for Young Scholars of Heilongjiang Province of China (Grant No.QC2012C008) the Natural Science Foundation of Heilongjiang Province (Grant No.E201356) 

主　　题：TiNx/CFy composite coatings Magnetron co-sputtering Wear resistance 

摘      要：TiN x/CF y composite coatings were prepared by RF magnetron co-sputtering using twin cylindrical tube targets with Ar and N 2 *** composition of the coatings deposited at various positions was analyzed by X-ray photoelectron spectroscopy（XPS） and Rutherford back-scattering spectrometry（RBS）.The results revealed that the composition of the deposited coatings has a wide range of TiN x and CFy contents at different deposition positions,which leads to different structures and *** hardness of the composite coatings increases from 32 to 1603 HV with increasing the TiN x *** static contact angle of water ranges from 20° to 102° and decreases upon the incorporation of more TiN x into the CF y *** presence of the CF y groups enhances the contact angle between the coating and the solutions dropped onto it,which could effectively protect the coating from corrosion and improve the wear resistance properties in high relative humidity（RH）.The brittleness of the coatings decreases due to the softness of the CF y component,which can bear most of the load and result in less probability of crack *** results demonstrate the existence of a Ti-（C N） chemical bond in the composite coatings,which improves the wear resistance of the *** is indicated that the wear resistance of the TiN x/CF y coatings is independent of the ***,these properties depend on the uniform structure and the existence of chemical bonding between the TiN x and CF y ***,a specific ratio between the soft CF y phase and the hard TiN x phase can produce coatings with good wear resistance.