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Second Harmonic Generation in Scanning Probe Microscopy for Edge Localization

作     者:HU Xiao-Gen LI Yu-He LIN Hao-Shan WANG Dong-Sheng QI Xin 胡小根;李玉和;林浩山;王东生;祁鑫

作者机构:State Key Laboratory of Precision Measurement Technology and InstrumentsDepartment of Precision Instruments and MechanologyTsinghua UniversityBeijing 100084 

出 版 物:《Chinese Physics Letters》 (中国物理快报(英文版))

年 卷 期:2011年第28卷第4期

页      面:91-93页

核心收录:

学科分类:0809[工学-电子科学与技术(可授工学、理学学位)] 08[工学] 

基  金:Supported by the National Natural Science Foundation of China under Grant No 50705051 

主  题:harmonic Probe harmonics 

摘      要:We present an approach of second harmonic generation for edge localization of nano-scale defects measurement,based on the impact of the oscillating tip on the sample that induces higher harmonics of the excitation *** harmonic signals of tip motion are measured by the heterodyne *** edge amplitude ratio for the edge characterization can be calculated by a mechanics model and the threshold of edge localization is experimentally determined by second harmonic *** approach has been successfully utilized to measure the pitch of a standard *** results show that the second harmonic is sensitive to locating the edge of nano-scale defects with high accuracy.

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