Highly Sensitive Rayleigh Wave Hydrogen Sensors with WO_(3) Sensing Layers at Room Temperature
作者机构：Lab of Modern AcousticsInstitute of AcousticsNanjing UniversityNanjing 210093
出 版 物：《Chinese Physics Letters》 (中国物理快报（英文版）)
年 卷 期：2011年第28卷第11期
页 面：56-59页
核心收录：
学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学]
基 金：by the National Natural Science Foundation of China under Grant No 11174142 and the National Basic Research Program of China under Grant No 2012CB921504
摘 要：Rayleigh wave hydrogen sensors based on 128∘YX-LiNbO_(3) substrates with WO_(3) sensing layers operating at room temperature are *** experimental results indicate that the WO_(3) layers obtained by a sol-gel method have much higher sensitivities because the sensing layers produced by the sol-gel method have small grains and high roughness and *** is also confirmed that in the sol-gel method,keeping WO_(3) solutions at low temperature and/or decreasing the viscosity of the solutions can decrease the grain sizes and increase the hydrogen-absorbability of the sensing *** the optimized preparation conditions,the high sensitivity of the hydrogen sensors at room temperature is obtained,in which 1%hydrogen in natural air induces the frequency shift of 72 kHz at the operating frequency of 124.2 MHz.
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