Sol-Gel Based Soft Lithography and Piezoresponse Force Microscopy of Patterned Pb(Zr_(0.52)Ti _(0.48))O_3 Microstructures

作     者：Lining Lani Shuhong Xie Li Tan Jiangyu Li 

作者机构：Key Laboratory of Low Dimensional Materials and Application Technology of Ministry of Education and Faculty of Materials Optoelectronics and Physics Xiangtan University Xiangtan 411105 China Department of Engineering Mechanics University of Nebraska Lincoln 68588-0526 USA Department of Mechanical Engineering University of Washington Seattle Washington 98195-2600 USA 

出 版 物：《Journal of Materials Science & Technology》 (材料科学技术（英文版）)

年 卷 期：2010年第26卷第5期

页      面：439-444页

核心收录：

学科分类：080801[工学-电机与电器] 0808[工学-电气工程] 07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0702[理学-物理学] 

基　　金：support from National Natural Science Foundation of China (Grant Nos. 10772155,10732100 and 10902095) the Provincial Natural Science Foundation of Hunan Province, China (Grant Nos.07JJ1008 and 09JJ7004) the Scientific Research Fund of Hunan Provincial Education Department (Grant No.08C864) The Asylum Research MFP-3D Atomic Force Microscope was acquired through an ARO DURIP grant(W911NF-08-01-0262) support from US National Science Foundation (DMR 0706100 and OS) 

主　　题：Soft lithography Piezoresponse force microscopy Pb(Zr0.52Ti0.48)O3 

摘      要：Sol-gel based soft lithography technique has been developed to pattern a variety of ferroelectric Pb（Zr0.52Ti0.48）O3（PZT） microstructures,with feature size approaching 180 nm and good pattern transfer between the master mold and patterned films.X-ray diffraction and high-resolution transmission electron microscopy confirm the perovskite structure of the patterned *** force microscopy（PFM） and switching spectroscopy piezoresponse force microscopy（SSPFM） confirm their piezoelectricity and *** as high as 2.75 nm has been observed,comparable to typical PZT *** patterned PZT microstructures are promising for a wide range of device applications.