mc-Si:H/c-Si solar cell prepared by PECVD

作     者：XU Ying LIAO Xianbo DIAO Hongwei Li Xudong ZENG Xiangbo LIU Xiaoping WANG Minhua WANG Wenjing 

作者机构：State Laboratory for Surface Physics Institute of Semiconductors and Center for Condensed Matter Physics Chinese Acad-bmy of Sciences Beijing 100083 China Beijing Solar Energy Research Institute Beijing 100083 China State Laboratory for Surface Physics Institute of Semiconductors and Center for Condensed Matter Physics Chinese Acad-bmy of Sciences Beijing 100083 China State Laboratory for Surface Physics Institute of Semiconductors and Center for Condensed Matter Physics Chinese Acad-bmy of Sciences Beijing 100083 China Beijing Solar Energy Research Institute Beijing 100083 China State Laboratory for Surface Physics Institute of Semiconductors and Center for Condensed Matter Physics Chinese Acad-bmy of Sciences Beijing 100083 China Beijing Solar Energy Research Institute Beijing 100083 China Beijing Solar Energy Research Institute Beijing 100083 China Beijing Solar Energy Research Institute Beijing 100083 China 

出 版 物：《Rare Metals》 (稀有金属（英文版）)

年 卷 期：2006年第25卷第z1期

页      面：176-179页

核心收录：

学科分类：0806[工学-冶金工程] 08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0703[理学-化学] 0702[理学-物理学] 

基　　金：This project was financially supported by the National Science Foundation of Beijing  China (No.04D063) 

主　　题：solar cell hetero-junction amorphous silicon plasma enhanced CVD 

摘      要：Hetero-junction solar cells with an mc-Si:H window layer were achieved. The open voltage is increased while short current is decreased with increasing the mc-Si:H layer′s thickness of emitter layer. The highest of Voc of 597 mV has obtained. When fixed the thickness of 30 nm, changing the N type from amorphous silicon layer to micro-crystalline layer, the efficiency of the hetero-junction solar cells is increased. Although the hydrogen etching before deposition enables the c-Si substrates to become rough by AFM images, it enhances the formation of epitaxial-like micro-crystalline silicon and better parameters of solar cell can be obtained by implying this process. The best result of efficiency is 13.86% with the Voc of 549.8 mV, Jsc of 32.19 mA·cm-2 and the cell′s area of 1 cm2.