Research on Micro-Flow Self-Sensing Actuators Based on Piezoelectric Ceramic Stack `

作     者：Yan-Bo Wei Li-Ping Shi Xi-Wen Wei Jie Huang 

作者机构：School of Electronic EngineeringHeilongjiang University 

出 版 物：《Journal of Harbin Institute of Technology(New Series)》 (哈尔滨工业大学学报（英文版）)

年 卷 期：2014年第21卷第2期

页      面：63-67页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0810[工学-信息与通信工程] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0812[工学-计算机科学与技术（可授工学、理学学位）] 

基　　金：Sponsored by the Youths Science Foundation of Heilongjiang Province(Grant No.QC08C09) the Educational Committee Science Foundation of Heilongjiang Province(Grant No.11541272) 

主　　题：secondary piezoelectric effect micro-flow self-sensing actuator 

摘      要：The paper is concerned with the micro-flow self-sensing actuators,the work of which is based on the secondary piezoelectric effect. The piezoelectric ceramic stack can yield micro-displacement due to its first inverse piezoelectric effect. Therefore,we apply this micro-displacement to cell micro-flow injection. Moreover, due to the charge of the secondary direct piezoelectric effect,the piezoelectric ceramic stack is able to detect the force and displacement in the injection by itself. The experiments of first inverse piezoelectric effect and secondary direct piezoelectric effect are conducted. The experiment results show that,subjected to 0- 60 V input,the piezoelectric ceramic stack can generate 13. 45 μm displacement,and control accuracy can achieve 2 nm. It can completely meet the needs of cell micro-flow injection. Also,the experiments demonstrate that the micro-displacement due to the first inverse piezoelectric effect can be well self-sensed by the electric charge due to the secondary direct piezoelectric effect.