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Digital holographic shape measurement using Fizeau microscopy

Digital holographic shape measurement using Fizeau microscopy

作     者:D.G.Abdelsalam Junwei Min Daesuk Kim Baoli Yao 

作者机构:State Key Laboratory of Transient Optics and Photonics Xi'an Institute of Optics and Precision MechanicsChinese Academy of Sciences Engineering and Surface Metrology Laboratory National Institute of Standards Division of Mechanical System Engineering Chonbuk National University 

出 版 物:《Chinese Optics Letters》 (中国光学快报(英文版))

年 卷 期:2015年第13卷第10期

页      面:40-44页

核心收录:

学科分类:0808[工学-电气工程] 070207[理学-光学] 0809[工学-电子科学与技术(可授工学、理学学位)] 07[理学] 08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0803[工学-光学工程] 0702[理学-物理学] 

基  金:supported by the Chinese Academy of Sciences Fellowship for Postdoctoral and Visiting Scholars from Developing Countries 

主  题:interferometer holographic captured reconstructed numerically microscopic Reconstruction compensate wavefront filtered 

摘      要:We present a Fizeau interferometer using a microscopic objective as a tool for surface contouring without the need for a numerical lens for reconstruction. The interferometer is associated with a telescope system to feature the object with collimated light. The experiment is conducted on two objects possessing different step *** phase maps from the captured off-axis holograms are calculated numerically, which allows us to deduce the contours of the objects. The great advantages of the presented technique are that it can be done in real time and there is no need for numerical lenses for micro-objects reconstruction.

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