Recent progresses in thermal treatment of β-Ga_(2)O_(3) single crystals and devices

作     者：Yuchao Yan Zhu Jin Hui Zhang Deren Yang Yuchao Yan;Zhu Jin;Hui Zhang;Deren Yang

作者机构：State Key Laboratory of Silicon and Advanced Semiconductor Materials and School of Materials Science and EngineeringZhejiang UniversityHangzhou 310027China Zhejiang Provincial Key Laboratory of Power Semiconductor Materials and DevicesZJU-Hangzhou Global Scientific and Technological Innovation CenterHangzhou 311200China 

出 版 物：《International Journal of Minerals,Metallurgy and Materials》 (矿物冶金与材料学报（英文版）)

年 卷 期：2024年第31卷第7期

页      面：1659-1677页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：the‘Pioneer’and‘Leading Goose’R&D Program of Zhejiang,China(No.2023C01193) the National Natural Science Foundation of China(Nos.52202150 and 22205203) the Foundation for Innovative Research Groups of the National Natural Science Foundation of China(No.61721005) the Fundamental Research Funds for the Central Universities(Nos.226-2022-00200 and 226-2022-00250) the National Program for Support of Topnotch Young Professionals 

主　　题：β-gallium oxide thermal treatment substrates devices 

摘      要：In recent years,ultra-wide bandgap β-Ga_(2)O_(3) has emerged as a fascinating semiconductor material due to its great potential in power and photoelectric *** semiconductor industrial,thermal treatment has been widely utilized as a convenient and effective approach for substrate property modulation and device ***,a thorough summary of β-Ga_(2)O_(3) substrates and devices behaviors after high-temperature treatment should be *** this review,we present the recent advances in modulating properties of β-Ga_(2)O_(3) substrates by thermal treatment,which include three major applications:(ⅰ)tuning surface electrical properties,(ⅱ)modifying surface morphology,and(ⅲ)oxidating ***,regulating electrical contacts and handling with radiation damage and ion implantation have also been discussed in device *** each category,universal annealing conditions were speculated to figure out the corresponding problems,and some unsolved questions were proposed *** review could construct a systematic thermal treatment strategy for various purposes and applications of β-Ga_(2)O_(3).