Controllable growth of wafer-scale PdS and PdS_(2) nanofilms via chemical vapor deposition combined with an electron beam evaporation technique

作     者：Hui Gao Hongyi Zhou Yulong Hao Guoliang Zhou Huan Zhou Fenglin Gao Jinbiao Xiao Pinghua Tang Guolin Hao Hui Gao;Hongyi Zhou;Yulong Hao;Guoliang Zhou;Huan Zhou;Fenglin Gao;Jinbiao Xiao;Pinghua Tang;Guolin Hao

作者机构：School of Physics and Optoelectronics and Hunan Institute of Advanced Sensing and Information TechnologyXiangtan UniversityXiangtan 411105China College of Physics and Technology&Guangxi Key Laboratory of Nuclear Physics and TechnologyGuangxi Normal UniversityGuilin 541004China Department of Electronic and Electrical EngineeringUniversity of SheffieldSheffield S102TNUK National Laboratory of Solid State MicrostructuresNanjing UniversityNanjing 210093China 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2023年第44卷第12期

页      面：64-71页

核心收录：

学科分类：080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：supported by National Natural Science Foundation of China (No.11974301) Key Research and Development Program of Hunan Province (No.2022GK2007) Key Project from Department Education of Hunan Province (No.22A0123) Scientific Research Fund of Hunan Provincial Education Department (No.21B0136) National college students innovation and entrepreneurship training program (No.S202310530016) 

主　　题：PdS PdS_(2) nanofilms controllable growth chemical vapor deposition electron beam evaporation 

摘      要：Palladium(Pd)-based sulfides have triggered extensive interest due to their unique properties and potential applications in the fields of electronics and ***,the synthesis of large-scale uniform PdS and PdS_(2)nanofilms(NFs)remains an enormous *** this work,2-inch wafer-scale PdS and PdS_(2) NFs with excellent stability can be controllably prepared via chemical vapor deposition combined with electron beam evaporation *** thickness of the pre-deposited Pd film and the sulfurization temperature are critical for the precise synthesis of PdS and PdS_(2) NFs.A corresponding growth mechanism has been proposed based on our experimental results and Gibbs free energy *** electrical transport properties of PdS and PdS_(2) NFs were explored by conductive atomic force *** findings have achieved the controllable growth of PdS and PdS_(2) NFs,which may provide a pathway to facilitate PdS and PdS_(2) based applications for next-generation high performance optoelectronic devices.