Controlled synthesis of monodispersed spherical ruthenium powders

作     者：Feng-Shuo Xu Hao Cui Man-Men Liu Jia-Lin Chen Ming Wen Chuan-Jun Wang Wei Wang Song Li Xu-Dong Sun Shao-Hong Liu Feng-Shuo Xu;Hao Cui;Man-Men Liu;Jia-Lin Chen;Ming Wen;Chuan-Jun Wang;Wei Wang;Song Li;Xu-Dong Sun;Shao-Hong Liu

作者机构：Key Laboratory for Anisotropy and Texture of Materials(Ministry of Education)School of Materials Science and EngineeringNortheastern UniversityShenyang 110819China State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum MetalsYunnan Precious Metals Laboratory Co.Ltd.Kunming 650106China 

出 版 物：《Rare Metals》 (稀有金属（英文版）)

年 卷 期：2023年第42卷第12期

页      面：4246-4254页

核心收录：

学科分类：0806[工学-冶金工程] 08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 

基　　金：financially supported by the National Natural Science Foundation of China (Nos.51977027 and51967008) Yunnan Key Research and Development Program (No.202102AB080008) the Fundamental Research Funds for the Central Universities (Nos.N2002007 and N182508026) the Open Project of Yunnan Precious Metals Laboratory Co.,Ltd. (No.YPML-2023050250) the State Key Laboratory of AdvancedTechnologies for Comprehensive Utilization of Platinum Metals (No.SKL-SPM-202014 and SKL-SPM-202015) 

主　　题：Ruthenium Sputtering target Spherical powder Integration circuits Magnetic recording 

摘      要：Monodispersed spherical Ru powders are essential for fabricating high-performance Ru sputtering targets,which have applications in very-large-scale integration circuits and magnetic recording ***,the synthesis of such powders remains a major ***,we reported the synthesis of monodispersed spherical Ru powders through controlling the molar ratio of SO_(4)^(2-)to Ru^(3+)in urea homogeneous precipitation solution and the annealing *** the addition of(NH4)2SO_(4)into the reaction solution,only gel-like precipitation particles were *** introducing(NH_(4))_(2)SO_(4) into the reaction solution and controlling the molar ratio of SO_(4)^(2-)to Ru3+between 0.50 and 1.00,monodispersed spherical precursor powders were *** nucleation and growth of monodispersed spherical precursor particles in solution were found to conform to LaMer s *** controlled annealing at 450℃in a hydrogen atmosphere,the obtained metallic Ru powder with an average particle size of 135 nm inherited the spherical morphology and excellent dispersity from the monodispersed spherical precursor *** results and findings would deepen the understanding of the preparation of monodispersed Ru and Ru-like powders.