Study on the performance of thin-film VCSELs on composite metal substrate

作     者：William Anderson Lee Sanchez Shreekant Sinha Po‑Yu Wang Ray‑Hua Horng William Anderson Lee Sanchez;Shreekant Sinha;Po-Yu Wang;Ray-Hua Horng

作者机构：Institute of ElectronicsYang Ming Chiao Tung UniversityHsinchu 30010China 

出 版 物：《Frontiers of Optoelectronics》 (光电子前沿（英文版）)

年 卷 期：2023年第16卷第4期

页      面：1-11页

核心收录：

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 

基　　金：supported by the Science and Technology Council,Taiwan,China under the grants NSTC 109-2634-F-009-028,110-2224-E-A49-003,111-2634-F-A49-007,and 111-2218-E-A49-019-MBK,Ingentec Corp.and the Center for Emergent Functional Matter Science of Yang Ming Chiao Tung University from the Featured Areas Research Center Program within the framework of the Higher Education Sprout Project(Taiwan,China) funding and material measurement support(grant number:2022-T-018)and we thank Taiwan Semiconductor Research Institute for facilities supporting 

主　　题：Thin film VCSELs GaAs substrate Composite metal CIC substrate Twice-bonding transfer Electrical properties Heat dissipation 

摘      要：Thin film p-side up vertical-cavity surface-emitting lasers(VCSELs)with 940 nm wavelength on a composite metal(Copper/Invar/Copper;CIC)substrate has been demonstrated by twice-bonding transfer and substrate removing *** CIC substrate is a sandwich structure with a 10µm thick Copper(Cu)layer/30µm thick Invar layer/10µm thick Cu *** Invar layer was composed of Iron(Fe)and Nickel(Ni)with a proportion of 70:*** thermal expansion coefcient of the composite CIC metal can match that of the GaAs *** results that the VCSEL layers can be successfully transferred to CIC metal substrate without *** 1 mA current,the top-emitting VCSEL/GaAs and thin-flm VCSEL/CIC had a voltage of 1.39 and 1.37 V,*** optical output powers of VCSEL/GaAs and VCSEL/CIC were 21.91 and 24.40 mW,*** 50µm thick CIC substrate can play a good heat dissipation function,which results in improving the electrical and optical characteristics of thin flm VCSELs/*** VCSEL/CIC exhibited a superior thermal management capability as compared with VCSEL/*** obtained data suggested that VCSELs on a composite metal substrate not only afected signifcantly the characteristics of thin film VCSEL,but also improved considerably the device thermal performance.