Rapid prototyping of a polymer MEMS dropletdispenser by laser-assisted 3D printing

作     者：Rémi Courson Oleksii Bratash Ali Maziz CloéDesmet Ricardo Alvarado Meza Loïc Leroy Elodie Engel Arnaud Buhot Laurent Malaquin Thierry Leïchlé 

作者机构：LAAS-CNRSUniversitéde ToulouseCNRS31400 ToulouseFrance UniversitéGrenoble AlpesCNRSCEAIRIGSyMMES38000 GrenobleFrance Georgia Tech−CNRS International Research LaboratoryAtlantaGA 30332USA 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2023年第9卷第4期

页      面：211-221页

核心收录：

学科分类：0710[理学-生物学] 07[理学] 070205[理学-凝聚态物理] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：This work was supported by the French National Research Agency(ANR)under the research project MOLY(grant ANR-15-CE19–0005)and CBH-EUR-GS(ANR-17-EURE-0003) by the European Union’s Horizon 2020 research and innovation program as part of the HoliFAB project(grant agreement no.760927) by FEDER European Regional Funds and French Région Occitanie as part of the MultiFAB project(grant agreement number 16007407/MP00115MP0011594) by the Labex ARCANE,and by the French national technological network RENATECH. 

主　　题：cantilever reservoir printing 

摘      要：In this work, we introduce a polymer version of a previously developed silicon MEMS drop deposition tool for surfacefunctionalization that consists of a microcantilever integrating an open fluidic channel and a reservoir. The device isfabricated by laser stereolithography, which offers the advantages of low-cost and fast prototyping. Additionally,thanks to the ability to process multiple materials, a magnetic base is incorporated into the cantilever for convenienthandling and attachment to the holder of a robotized stage used for spotting. Droplets with diameters ranging from∼50 μm to ∼300 μm are printed upon direct contact of the cantilever tip with the surface to pattern. Liquid loading isachieved by fully immersing the cantilever into a reservoir drop, where a single load results in the deposition of morethan 200 droplets. The influences of the size and shape of the cantilever tip and the reservoir on the printing outcomeare studied. As a proof-of-concept of the biofunctionalization capability of this 3D printed droplet dispenser,microarrays of oligonucleotides and antibodies displaying high specificity and no cross-contamination are fabricated,and droplets are deposited at the tip of an optical fiber bundle.