A novel evolutionary method for parameter-free MEMS structural design and its application in piezoresistive pressure sensors

作     者：Qinggang Meng Junbo Wang Deyong Chen Jian Chen Bo Xie Yulan Lu 

作者机构：State Key Laboratory of Transducer TechnologyAerospace Information Research InstituteChinese Academy of Sciences100190 BeijingChina School of ElectronicElectrical and Communication EngineeringUniversity of Chinese Academy of Sciences100049 BeijingChina 

出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)

年 卷 期：2023年第9卷第5期

页      面：263-270页

核心收录：

学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程] 

基　　金：financially supported by the National Key R&D Program of China(2022YFB3204900) the Youth Innovation Promotion Association CAS(2023134 and 2022121) the Key Technology Team Project of Chinese Academy of Sciences(GJJSTD20210004) the National Natural Science Foundation of China(61825107,U1930206,62121003,and 62201549) 

主　　题：parameter evolutionary nonlinearity 

摘      要：In this paper,a novel simulation-based evolutionary method is presented for designing parameter-free MEMS structures with maximum degrees of *** novel design method enabled semiautomatic structure evolution by weighing the attributes of each segment of the structure and yielded an optimal design after multiple *** proposed method was utilized to optimize the pressure-sensitive diaphragm of a piezoresistive pressure sensor(PPS).Finite element method(FEM)simulations revealed that,in comparison to conventional diaphragms without islands and with square islands,the optimized diaphragm increased the stress by 10%and 16%and reduced the nonlinearity by 57%and 77%,*** improvements demonstrate the value of this *** of the fabricated PPS revealed a high sensitivity of 8.8 mV V−1 MPa−1 and a low nonlinearity of 0.058%FS at 20°C,indicating excellent sensor performance.