Acousto-optic scanning spatial-switching multiphoton lithography

作     者：Binzhang Jiao Fayu Chen Yuncheng Liu Xuhao Fan Shaoqun Zeng Qi Dong Leimin Deng Hui Gao Wei Xiong Binzhang Jiao;Fayu Chen;Yuncheng Liu;Xuhao Fan;Shaoqun Zeng;Qi Dong;Leimin Deng;Hui Gao;Wei Xiong

作者机构：Wuhan National Laboratory for Optoelectronics and School of Optical and Electronic InformationHuazhong University of Science and TechnologyWuhanHubei 430074People’s Republic of China Optics Valley LaboratoryWuhanHubei430074People’s Republic of China 

出 版 物：《International Journal of Extreme Manufacturing》 (极端制造（英文）)

年 卷 期：2023年第5卷第3期

页      面：597-606页

核心收录：

学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0802[工学-机械工程] 080201[工学-机械制造及其自动化] 0702[理学-物理学] 

基　　金：National Key Research and Development Program of China(2021YFF0502700) National Natural Science Foundation of China(52275429,62205117) Innovation project of Optics Valley Laboratory(OVL2021ZD002) Hubei Provincial Natural Science Foundation of China(2022CFB792) Young Elite Scientists Sponsorship Program by CAST(2022QNRC001) West Light Foundation of the Chinese Academy of Sciences(xbzg-zdsys-202206) Knowledge Innovation Program of Wuhan-Shuguang 

主　　题：3D nano-printing acousto-optic scanning aberration-free wavefront spatial-switching 

摘      要：Nano-3D printing has obtained widespread attention owing to its capacity to manufacture end-use components with nano-scale features in recent *** lithography(MPL)is one of the most promising 3D nanomanufacturing technologies,which has been widely used in manufacturing micro-optics,photonic crystals,microfluidics,meta-surface,and mechanical *** of tremendous potential of MPL in laboratorial and industrial applications,simultaneous achievement of high throughput,high accuracy,high design freedom,and a broad range of material structuring capabilities remains a long-pending *** address the issue,we propose an acousto-optic scanning with spatial-switching multispots(AOSS)***-free acousto-optic scanning and nonlinear swept techniques have been developed for achieving ultrahigh-speed and aberration-free ***,a spatial optical switch concept has been implemented to significantly boost the lithography throughput while maintaining high resolution and high design *** eight-foci AOSS system has demonstrated a record-high 3D printing rate of 7.6×10^(7)voxel s^(-1),which is nearly one order of magnitude higher than earlier scanning MPL,exhibiting its promise for future scalable 3D nanomanufacturing.