A monolithically integrated microcantilever biosensor based on partially depleted SOI CMOS technology
作者机构：School of Integrated CircuitsPeking UniversityNational Key Laboratory of Science and Technology on Micro/Nano FabricationBeijing 100871China
出 版 物：《Microsystems & Nanoengineering》 (微系统与纳米工程（英文）)
年 卷 期：2023年第9卷第3期
页 面：273-283页
核心收录：
学科分类：080202[工学-机械电子工程] 08[工学] 0802[工学-机械工程]
基 金：This research was funded by the National Natural Science Foundation of China(Grant No.61935001)
主 题：SOI amplifier cantilever
摘 要：This paper presents a monolithically integrated aptasensor composed of a piezoresistive microcantilever array and an on-chip signal processing *** microcantilevers,each of them embedded with a piezoresistor,form three sensors in a Wheatstone bridge *** on-chip signal processing circuit consists of a multiplexer,a chopper instrumentation amplifier,a low-pass filter,a sigma-delta analog-to-digital converter,and a serial peripheral *** the microcantilever array and the on-chip signal processing circuit were fabricated on the single-crystalline silicon device layer of a silicon-on-insulator(SOI)wafer with partially depleted(PD)CMOS technology followed by three micromachining *** integrated microcantilever sensor makes full use of the high gauge factor of single-crystalline silicon to achieve low parasitic,latch-up,and leakage current in the PD-SOI CMOS.A measured deflection sensitivity of 0.98×10^(−6) nm^(−1) and an output voltage fluctuation of less than 1μV were obtained for the integrated microcantilever.A maximum gain of 134.97 and an input offset current of only 0.623 nA were acquired for the on-chip signal processing *** functionalizing the measurement microcantilevers with a biotin-avidin system method,human IgG,abrin,and staphylococcus enterotoxin B(SEB)were detected at a limit of detection(LOD)of 48 pg/***,multichannel detection of the three integrated microcantilever aptasensors was also verified by detecting *** these experimental results indicate that the design and process of monolithically integrated microcantilevers can meet the requirements of high-sensitivity detection of biomolecules.
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