A 640×640 ISFET array for detecting cell metabolism

作     者：Ling Yang Yizheng Huang Zhigang Song Manqing Tan Yude Yu Zhao Li Ling Yang;Yizheng Huang;Zhigang Song;Manqing Tan;Yude Yu;Zhao Li

作者机构：Institute of SemiconductorsChinese Academy of SciencesBeijing 100083China College of Materials Science and Opto-Electronic TechnologyUniversity of Chinese Academy of SciencesBeijing 100049China Beijing Key Laboratory of Genome and Precision Medicine TechnologiesBeijing 100101China 

出 版 物：《Journal of Semiconductors》 (半导体学报（英文版）)

年 卷 期：2023年第44卷第2期

页      面：84-91页

核心收录：

学科分类：0831[工学-生物医学工程（可授工学、理学、医学学位）] 080903[工学-微电子学与固体电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0836[工学-生物工程] 

基　　金：supported by the National Key Research and Development Program of China(Grant No.2021YFC2401001) 

主　　题：ASIC ISFET array pH monitoring ion imaging cell metabolism 

摘      要：Ion sensitive field effect transistor(ISFET)devices are highly accurate,convenient,fast and low-cost in the detection of ions and biological macromolecules,such as DNA molecules,antibodies,enzymatic substrates and cellular *** high-throughput cell metabolism detection,we successfully designed a very large-scale biomedical sensing application specific integrated circuit(ASIC)with a 640×640 ISFET *** circuit design is highly integrated by compressing the size of a pixel to 7.4×7.4μm^(2)and arranging the layout of even and odd columns in an interdigital pattern to maximize the utilization of *** chip can operate at a speed of 2.083M pixels/s and the dynamic process of the fluid flow on the surface of the array was monitored through ion *** pH sensitivity is 33±4 mV/pH and the drift rate is 0.06 mV/min after 5 h,indicating the stability and robustness of the ***,the chip was applied to monitor pH changes in CaSki cells metabolism,with pH shifting from 8.04 to 7.40 on *** platform has the potential for continuous and parallel monitoring of cell metabolism in single-cell culture arrays.