Study of selectively buried ion-exchange glass waveguides using backside masking

作     者：裴重阳 王根成 杨冰 杨龙志 郝寅雷 江晓清 杨建义 

作者机构：Department of Information Science and Electronics Engineering Zhejiang University Cyrus Tang Center for Sensor Materials and Applications Zhejiang University 

出 版 物：《Chinese Optics Letters》 (中国光学快报（英文版）)

年 卷 期：2015年第13卷第2期

页      面：41-44页

核心收录：

学科分类：070207[理学-光学] 0808[工学-电气工程] 07[理学] 0809[工学-电子科学与技术（可授工学、理学学位）] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学] 

基　　金：supported by the Natural Science Foundation of China under Grant Nos.61228501 and 61475137 the National 863 Project of China under Grant No.2012AA012203 the Doctoral Discipline Foundation of Ministry of Education under Grant No.20120101110054 

主　　题：Ion exchange Substrates Waveguides 

摘      要：In this Letter, we study the characteristics of a selectively buried glass waveguide that is fabricated by the backside masking method. The results show that the surface region appears when the width of the backside mask is larger than 7 mm. Here, the glass substrate is 1.5 mm thick. It is also found that the buried depth evolution of the transition region remains almost unchanged and is independent of the width of the backside mask. The loss of the transition region is only 0.28 d B at the wavelength of 1.55 μm if the surface condition is good enough.