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LiNbO_(3) channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

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Chinese Optics Letters 2022年第7期20卷 13-17页

作者：王素梅赵金花谷金军卜铭洋范丽李爽秦希峰姚一村任莹莹王磊 School of Science Shandong Jianzhu UniversityJinan 250101China Shandong Key Laboratory of Optical Communication Science and Technology School of Physical Science and Information TechnologyLiaocheng UniversityLiaocheng 252059China Shandong Provincial Engineering and Technical Center of Light Manipulations&Shandong Provincial Key Laboratory of Optics and Photonic Device School of Physics and ElectronicsShandong Normal UniversityJinan 250014China School of Physics Shandong UniversityJinan 250100China

Lithium niobate(LiNbO_(3),LN)channel and ridge waveguides have been successfully fabricated by He ion implantation,which has energy of 500 keV and fluence of 1.5×10^(16)ions/cm^(2) and is combined with lithography and the precise diamond dicing technique.The refractive index profile of the annealed LN planar waveguide was reconstructed.The propagation loss of the channel waveguide with a width of 10μm and that of the ridge waveguides with widths of 25μm and 15μm were investigated by the end-face coupling method.In our work,the factors that affect the waveguide properties of channel and ridge waveguides were revealed.

关键词： lithium niobate waveguides ion implantation ridge waveguide channel waveguide

On-chip beam rotators,adiabatic mode converters,and waveplates through low-loss waveguides with variable cross-sections

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Light(Science & Applications) 2022年第8期11卷 1876-1890页

作者： Bangshan Sun Fyodor Morozko Patrick S.Salter Simon Moser Zhikai Pong Raj B.Patel Ian A.Walmsley Mohan Wang Adir Hazan Nicolas Barré Alexander Jesacher Julian Fells Chao He Aviad Katiyi Zhen-Nan Tian Alina Karabchevsky Martin J.Booth Department of Engineering Science University of OxfordOxfordOX13PJUK School of Electrical and Computer Engineering Ben-Gurion University of the NegevP.O.B.653Beer-Sheva8410501Israel Institute of Biomedical Physics Medical University of InnsbruckMüllerstraße 446020InnsbruckAustria Ultrafast Quantum Optics group Department of PhysicsImperial College LondonLondonUK Department of Physics University of OxfordOxfordUK Erlangen Graduate School in Advanced Optical Technologies(SAOT) Friedrich-Alexander-University Erlangen-NürnbergPaul-Gordan-Straße 691052ErlangenGermany State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun130012China

Photonics integrated circuitry would benefit considerably from the ability to arbitrarily control waveguide cross-sections with high precision and low loss,in order to provide more degrees of freedom in manipulating propagating light.Here,we report a new method for femtosecond laser writing of optical-fiber-compatible glass waveguides,namely spherical phase-induced multicore waveguide(SPIM-WG),which addresses this challenging task with three-dimensional on-chip light control.Fabricating in the heating regime with high scanning speed,precise deformation of cross-sections is still achievable along the waveguide,with shapes and sizes finely controllable of high resolution in both horizontal and vertical transversal directions.We observed that these waveguides have high refractive index contrast of 0.017,low propagation loss of 0.14 dB/cm,and very low coupling loss of 0.19 dB coupled from a single-mode fiber.SPIM-WG devices were easily fabricated that were able to perform on-chip beam rotation through varying angles,or manipulate the polarization state of propagating light for target wavelengths.We also demonstrated SPIM-WG mode converters that provide arbitrary adiabatic mode conversion with high efficiency between symmetric and asymmetric nonuniform modes;examples include circular,elliptical modes,and asymmetric modes from ppKTP(periodically poled potassium titanyl phosphate)waveguides which are generally applied in frequency conversion and quantum light sources.Created inside optical glass,these waveguides and devices have the capability to operate across ultra-broad bands from visible to infrared wavelengths.The compatibility with optical fiber also paves the way toward packaged photonic integrated circuitry,which usually needs input and output fiber connections.

关键词： waveguide waveguides polarization

Optical meta-waveguides for integrated photonics and beyond

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Light(Science & Applications) 2021年第12期10卷 2263-2306页

作者： Yuan Meng Yizhen Chen Longhui Lu Yimin Ding Andrea Cusano Jonathan A.Fan Qiaomu Hu Kaiyuan Wang Zhenwei Xie Zhoutian Liu Yuanmu Yang Qiang Liu Mali Gong Qirong Xiao Shulin Sun Minming Zhang Xiaocong Yuan Xingjie Ni State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua University100084 BeijingChina Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing and School of Information Science and TechnologyFudan UniversityShanghai 200433China School of Optical and Electronic Information Huazhong University of Science and TechnologyWuhan 430074China Department of Electrical Engineering Pennsylvania State UniversityUniversity ParkPA 16802USA Optoelearonic Division Department of EngineeringUniversity of Sannio1-82100 BeneventoItaly Department of Electrical Engineering Stanford UniversityStanfordCA 94305USA Nanophotonics Research Centre Shenzhen Key Laboratory of Micro-Scale Optical Information TechnologyShenzhen UniversityShenzhen 518060China Key Laboratory of Photonic Control Technology Ministry of EducationTsinghua University100084 BeijingChina Yiwu Research Institute of Fudan University Chengbei RoadYiwu City 322000 ZhejiangChina Wuhan National Laboratory for Optoelectronics Huazhong University of Science and TechnologyWuhan 430074 HubeiChina

The growing maturity of nanofabrication has ushered massive sophisticated optical structures available on a photonic chip.The integration of subwavelength-structured metasurfaces and metamaterials on the canonical building block of optical waveguides is gradually reshaping the landscape of photonic integrated circuits,giving rise to numerous metawaveguides with unprecedented strength in controlling guided electromagnetic waves.Here,we review recent advances in meta-structured waveguides that synergize various functional subwavelength photonic architectures with diverse waveguide platforms,such as dielectric or plasmonic waveguides and optical fibers.Foundational results and representative applications are comprehensively summarized.Brief physical models with explicit design tutorials,either physical intuition-based design methods or computer algorithms-based inverse designs,are cataloged as well.We highlight how meta-optics can infuse new degrees of freedom to waveguide-based devices and systems,by enhancing light-matter interaction strength to drastically boost device performance,or offering a versatile designer media for manipulating light in nanoscale to enable novel functionalities.We further discuss current challenges and outline emerging opportunities of this vibrant field for various applications in photonic integrated circuits,biomedical sensing,artificial intelligence and beyond.

关键词： waveguides waveguide beyond

Low-loss optical waveguides made with a high-loss material

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Light(Science & Applications) 2021年第1期10卷 12-18页

作者： Darius Urbonas Rainer F.Mahrt Thilo Stoferle IBM Research Europe—Zurich Saumerstrasse 48803 RuschlikonSwitzerland

For guiding light on a chip,it has been pivotal to use materials and process flows that allow low absorption and scattering.Based on subwavelength gratings,here,we show that it is possible to create broadband,multimode waveguides with very low propagation losses despite using a strongly absorbing material.We perform rigorous coupled-wave analysis and finite-difference time-domain simulations of integrated waveguides that consist of pairs of integrated high-index-contrast gratings.To showcase this concept,we demonstrate guiding of visible light in the wavelength range of 550-650 nm with losses down to 6dB/cm using silicon gratings that have a material absorption of 13,000 dB/cm at this wavelength and are fabricated with standard silicon photonics technology.This approach allows us to overcome traditional limits of the various established photonics technology platforms with respect to their suitable spectral range and,furthermore,to mitigate situations where absorbing materials,such as highly doped semiconductors,cannot be avoided because of the need for electrical driving,for example,for amplifiers,lasers and modulators.

关键词： waveguides absorbing absorption

Compact low-birefringence polarization beam splitter using vertical-dual-slot waveguides in silicon carbide integrated platforms

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Photonics Research 2022年第1期10卷 I0008-I0013页

作者： XIAODONG SHI JINGJING ZHANG WEICHEN FAN YAOQIN LU NIANHUA PENG KARSTEN ROTTWITT AND HAIYAN OU DTU Fotonik Technical University of DenmarkDK-2800 LyngbyDenmark Institute of Mirco/Nano Optoelectronic and Terahertz Technology Jiangsu UniversityZhenjiang 212013China Surrey Ion Beam Centre Surrey UniversityGuildfordGU27XHUK

The polarization beam splitter is a key component for polarization manipulation in photonic integrated circuits,but it is challenging to design for low-refractive-index optical materials,due to the low birefringence of the waveguides.We propose what we believe is a novel compact vertical-dual-slot waveguide-based coupling scheme for silicon carbide,enabling efficient low-birefringence polarization splitting by extensively modulating the transverse-magnetic mode distribution.We numerically and experimentally demonstrate the device in the 4H-siliconcarbide-on-insulator integrated platform,with a small footprint of 2.2 μm × 15 μm.The device,easy to fabricate via a single lithography process as other components on the chip,exhibits low insertion loss of 13 dB,over 80 nm wavelength range.

关键词： polarization waveguides waveguide

Photon propagation control on laser-written photonic chips enabled by composite waveguides

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Photonics Research 2023年第5期11卷 829-838页

作者： ZE-ZHENG LI ZHEN-NAN TIAN ZHONG-TIAN LI YANG OUYANG QI-DAI CHEN HONG-BO SUN State Key Laboratory of Integrated Optoelectronics College of Electronic Science and EngineeringJilin UniversityChangchun 130012China State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision InstrumentTsinghua UniversityBeijing 100084China

Femtosecond laser direct writing(Fs LDW)three-dimensional(3D)photonic integrated circuits(PICs)can realize arbitrary arrangement of waveguide arrays and coupling devices.Thus,they are capable of directly constructing arbitrary Hamiltonians and performing specific computing tasks crucial in quantum simulation and computation.However,the propagation constantβis limited to a narrow range in single-mode waveguides by solely changing the processing parameters,which greatly hinders the design of Fs LDW PICs.This study proposes a composite waveguide(CWG)method to increase the range ofβ,where a new single-mode composite waveguide comprises two adjacent circular waveguides.As a result,the photon propagation can be controlled and the variation range ofβcan be efficiently enlarged by approximately two times(Δβ~36 cm-1).With the CWG method,we successfully realize the most compact Fs LDW directional couplers with a 9μm pitch in a straight-line form and achieve the reconstruction of the Hamiltonian of a Hermitian array.Thus,the study represents a step further toward the fine control of the coupling between waveguides and compact integration of Fs LDW PICs.

关键词： waveguide waveguides composite

Advanced mid-infrared plasmonic waveguides for on-chip integrated photonics

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Photonics Research 2023年第10期11卷 1694-1702页

作者： MAURO DAVID DAVIDE DISNAN ELENA ARIGLIANI ANNA LARDSCHNEIDER GEORG MARSCHICK HANH T.HOANG HERMANN DETZ BERNHARD LENDL ULRICH SCHMID GOTTFRIED STRASSER BORISLAV HINKOV Institute of Solid State Electronics and Center for Micro-and Nanostructures TU WienViennaAustria Institute of Sensor and Actuator Systems TU WienViennaAustria Central European Institute of Technology Brno University of TechnologyBrnoCzech Republic Institute of Chemical Technologies and Analytics ViennaAustria

Long-wave infrared(LWIR, 8–14 μm) photonics is a rapidly growing research field within the mid-IR with applications in molecular spectroscopy and optical free-space communication. LWIR applications are often addressed using rather bulky tabletop-sized free-space optical systems, preventing advanced photonic applications,such as rapid-time-scale experiments. Here, device miniaturization into photonic integrated circuits(PICs) with maintained optical capabilities is key to revolutionize mid-IR photonics. Subwavelength mode confinement in plasmonic structures enabled such miniaturization approaches in the visible-to-near-IR spectral range. However,adopting plasmonics for the LWIR needs suitable low-loss and-dispersion materials with compatible integration strategies to existing mid-IR technology. In this paper, we further unlock the field of LWIR/mid-IR PICs by combining photolithographic patterning of organic polymers with dielectric-loaded surface plasmon polariton(DLSPP) waveguides. In particular, polyethylene shows favorable optical properties, including low refractive index and broad transparency between ~2 μm and 200 μm. We investigate the whole value chain, including design, fabrication, and characterization of polyethylene-based DLSPP waveguides and demonstrate their first-time plasmonic operation and mode guiding capabilities along S-bend structures. Low bending losses of ~1.3 d B and straight-section propagation lengths of ~1 mm, pave the way for unprecedented complex on-chip mid-IR photonic devices. Moreover, DLSPPs allow full control of the mode parameters(propagation length and guiding capabilities) for precisely addressing advanced sensing and telecommunication applications with chip-scale devices.

关键词： waveguides transparency straight

Wave propagation in parallel-plate waveguides filled with nonlinear left-handed material

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Chinese Physics B 2011年第1期20卷 346-351页

作者： Burhan Zamir Rashid Ali Department of Physics University of the PunjabQuaid-i-Azam CampusLahore-54590Pakistan

A theoretical investigation of field components for transverse electric mode in the parallel-plate waveguides has been studied. In this analysis two different types of waveguide structures have been discussed, i.e., （a） normal good/perfect conducting parallel-plate waveguide filled with nonlinear left-handed material and （b） high-temperature-superconducting parallel-plate waveguide filled with nonlinear left-handed material. The dispersion relations of transverse electric mode have also been discussed for these two types of waveguide structures.

关键词： waveguides wave propagation left-handed materials

Ultra-broadband nanophotonic phase shifter based on subwavelength metamaterial waveguides

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Photonics Research 2020年第3期8卷 359-367页

作者： DAVID GONZáLEZ-ANDRADE JOSéMANUEL LUQUE-GONZáLEZ J.GONZALO WANGüEMERT-PéREZ ALEJANDRO ORTEGA-MONUX PAVEL CHEBEN íNIGO MOLINA-FERNáNDEZ AITOR V.VELASCO Instituto deóptica Daza de Valdés Consejo Superior de Investigaciones Cientificas(CSIC)Madrid 28006Spain Departamento de Ingenieria de Comunicaciones ETSI TelecomunicaciónUniversidad de MálagaMálaga 29071Spain National Research Council Canada Ottawa K1A 0R6Canada Bionand Center for Nanomedicine and Biotechnology Parque Tecnológico de AndaluciaMálaga 29590Spain

Optical phase shifters are extensively used in integrated optics not only for telecom and datacom applications but also for sensors and quantum computing.While various active solutions have been demonstrated,progress in passive phase shifters is still lacking.Here we present a new type of ultra-broadband 90°phase shifter,which exploits the anisotropy and dispersion engineering in subwavelength metamaterial waveguides.Our Floquet–Bloch calculations predict a phase-shift error below 1.7°over an unprecedented operation range from 1.35 to 1.75μm,i.e.,400 nm bandwidth covering the E,S,C,L,and U telecommunication bands.The flat spectral response of our phase shifter is maintained even in the presence of fabrication errors up to 20 nm,showing greater robustness than conventional structures.Our device was experimentally demonstrated using standard220 nm thick SOI wafers,showing a fourfold reduction in the phase variation compared to conventional phase shifters within the 145 nm wavelength range of our measurement setup.The proposed subwavelength engineered phase shifter paves the way for novel photonic integrated circuits with an ultra-broadband performance.

关键词： waveguides phase maintained