Flexible substrates enabled highly integrated patterns with submicron precision toward intrinsically stretchable circuits

作     者：Wenkun Lv Zhaoxin Liu Zheng Li Zhifei Han Yongrui Yang Qi Li Yali Qiao Yanlin Song 

作者机构：Beijing National Laboratory for Molecular SciencesKey Laboratory of Green PrintingCAS Research/Education Centre for Excellence in Molecular SciencesInstitute of Chemistry Chinese Academy of Sciences(ICCAS)BeijingChina School of Chemistry and Chemical EngineeringUniversity of the Chinese Academy of SciencesBeijingChina State Key Laboratory of TraumaBurn and Combined InjuryInstitute of Burn ResearchSouthwest HospitalArmy Medical UniversityChongqingChina State Key Laboratory of Power SystemsDepartment of Electrical EngineeringTsinghua UniversityBeijingChina 

出 版 物：《SmartMat》 (智能材料（英文）)

年 卷 期：2022年第3卷第3期

页      面：503-512页

学科分类：08[工学] 0805[工学-材料科学与工程（可授工学、理学学位）] 080502[工学-材料学] 0703[理学-化学] 

基　　金：Beijing National Laboratory for Molecular Sciences,Grant/Award Numbers:BNLMSCXXM‐202005,2019BMS20003 National Natural Science Foundation of China,Grant/Award Number:2018YFA0703200 K.C.Wong Education Foundation,and China Postdoctoral Science Foundation,Grant/Award Number:2020M670466 External Cooperation Program of Chinese Academy of Sciences,Grant/Award Number:GJHZ201948 CAS‐VPST Silk Road Science Fund 2022,Grant/Award Number:121111KYSB20210006 National Key R&D Program of China,Grant/Award Numbers:52003276,22175185,52003273,51803217,51773206,91963212,51961145102,22002171 

主　　题：flexible devices highly integrated patterns liquid metal alloys printed electronics stretchable electronics 

摘      要：Fabricating high integration density,high resolution,and intrinsically stretchable patterns by patterned technologies remain *** printing enabled high-precision patterned fabrication at a facile ***,the pattern spacing constraint is the major limitation to high integration *** this study,we develop an elastomer-assisted strategy to improve the template printing process,which involves patterning on the prestrain elastic *** strategy overcomes the spacing limitation and enables the realization of a centimeter-scale pattern with submicron ***,the integration density of fabricated intrinsically stretchable patterns can reach 1932 lines on a substrate of 0.5 cm2;the assembly lines with a feature size of 880 nm and an interval of 955 ***,we demonstrate a facile approach for constructing silver nanoparticle/liquid metal alloy composite conductive *** as-prepared flexible electrodes can withstand up to 150%strain and a 2-mm bend *** method provides new insights into template printing ***,it opens a route for the simultaneous construction of functional patterned arrays with large scale,high integration density,and intrinsic stretchability,which will be useful for the integrated fabrication of various flexible electronic devices.