Localised solid-state nanopore fabrication via controlled breakdown using on-chip electrodes
作者机构：Department of MaterialsUniversity of OxfordOxfordOX13PHUK School of ChemistryUniversity of New South WalesSydneyNew South Wales 2052Australia Department of ChemistryImperial College LondonLondonW120BZUK Center for Nanophase Materials SciencesOak Ridge National LaboratoryOak RidgeTN 37830USA Instituto de Tecnologia Química e Biológica António XavierUniversidade Nova de LisboaAv.da RepúblicaOeiras 2780-157Portugal School of Physics and AstronomyQueen Mary University of LondonLondonE14NSUK
出 版 物：《Nano Research》 (纳米研究（英文版）)
年 卷 期：2022年第15卷第11期
页 面：9881-9889页
核心收录：
学科分类：07[理学] 070205[理学-凝聚态物理] 08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 0702[理学-物理学]
基 金：J.P.F.thanks the Oxford Australia Scholarship committee and the University of Western Australia for funding J.R.Y.was funded by an FCT contract according to DL57/2016,[SFRH/BPD/80071/2011] J.R.Y.’s lab was funded by national funds through FCT-Fundação para a Ciência e a Tecnologia,I.P.,Project MOSTMICRO-ITQB with refs UIDB/04612/2020 and UIDP/04612/2020 and Project PTDC/NAN-MAT/31100/2017 J.M.was supported through the UKRI Future Leaders Fellowship,Grant No.MR/S032541/1 with in-kind support from the Royal Academy of Engineering.A.P.I.and J.B.E.acknowledge support from BBSRC grant BB/R022429/1,EPSCR grant EP/P011985/1 Analytical Chemistry Trust Fund grant 600322/05 This project has also received funding from the European Research Council(ERC)under the European Union’s Horizon 2020 research and innovation programme(Nos.724300 and 875525) O.D.and STEM investigations were supported by the Center for Nanophase Materials Sciences(CNMS) a U.S.Department of Energy,Office of Science User Facility
主 题：solid-state nanopores dielectric breakdown nanofabrication single-molecule sensing nanopore arrays
摘 要：Controlled breakdown has recently emerged as a highly accessible technique to fabricate solid-state ***,in its most common form,controlled breakdown creates a single nanopore at an arbitrary location in the ***,we introduce a new strategy whereby breakdown is performed by applying the electric field between an on-chip electrode and an electrolyte solution in contact with the opposite side of the *** demonstrate two advantages of this ***,we can independently fabricate multiple nanopores at given positions in the membrane by localising the applied field to the ***,we can create nanopores that are self-aligned with complementary nanoelectrodes by applying voltages to the on-chip electrodes to locally heat the membrane during controlled *** new controlled breakdown method provides a path towards the affordable,rapid,and automatable fabrication of arrays of nanopores self-aligned with complementary on-chip nanostructures.
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