Impact of lanthanum on the modification of HfO_2 films structure

作     者：T.P.Smirnova L.V.Yakovkina V.O.Borisov 

作者机构：Nikolaev Institute of Inorganic Chemistry SB RAS 

出 版 物：《Journal of Rare Earths》 (稀土学报（英文版）)

年 卷 期：2015年第33卷第8期

页      面：857-862页

核心收录：

学科分类：0709[理学-地质学] 0819[工学-矿业工程] 07[理学] 070205[理学-凝聚态物理] 0708[理学-地球物理学] 0703[理学-化学] 0702[理学-物理学] 

基　　金：supported by the Russian Foundation for Basic Research(12-03-00131) 

主　　题：Hf1-xLaxOy films solid solutions X-ray diffraction microstructure rare earths 

摘      要：LaxHf1-xOy thin films with various concentrations of La, homogeneous and nonhomogeneous distributions of elements throughout the films thickness was purposefully grown by CVD. The composition of the films and their chemical structures were characterized throughout the films thickness by X-ray photoelectron spectroscopy （XPS） and energy-dispersive X-ray spectrometry （EDXA）. A full picture of the film crystallinity was provided by the combination of grazing incidence X-ray diffraction （GIXRD） synchrotron radiation （SR） and high resolution transmission electron microscopy （HR TEM）. It was shown that La acted as ＂molar volume modulator＂ and stabilized the nonequilibrium at T≤1300 ℃ cubic phases. The samples with La content in range of 7 at.%〈CLa〈22 at.% were materials with fluorite-type （Fm-3m） structure. The pyroehlore phase formation was observed at -18 at.% La content. The correlation between the La-doped content and the films microstructure was revealed.