Preparation and characterization of Pd-Ag alloy composite membrane with magnetron sputtering

作     者：赵宏宾 熊国兴 N.Stroh H.Brunner 

作者机构：Fraunhofer Institute of Interfacial Engineering and Biotechnology Nobelstrasse 12 D-70569 Stuttgart Germany Germany 

出 版 物：《Science China Chemistry》 (中国科学（化学英文版）)

年 卷 期：1999年第42卷第6期

页      面：581-588页

核心收录：

学科分类：08[工学] 080501[工学-材料物理与化学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：Project supported by the National Natural Science Foundation of China (Grant No. 29392003) the Chinese Academy of Sciences (Grant No. KMX 85-23), German BMBF and FhG-IGB 

主　　题：Pd-Ag membrane A1203 membrane sol-gel sputtering H2 separation 

摘      要：A Pd-Ag (24 wt%) alloy composite membrane was prepared by the magnetron sputtering. A γ-A1203 membrane was synthesized by the sol-gel method and used as substrate of the Pd-Ag alloy film. The process parameters of the magnetron sputtering were optimized as a function of the compactness of the Pd-Ag alloy film. The best membrane with a thickness of 1 μm was produced with a sputtering pressure of 2.7 Pa and a substrate temperature of 400°C. The membrane had an H2/N2 permselectivity of 51.5-1000 and an H, permeation rate of 0.036-1.17 x 10-5cm3/cm2.s. Pa, depending on operating conditions.