咨询与建议

看过本文的还看了

相关文献

该作者的其他文献

文献详情 >TiNiHf/SiO_(2)/Si shape memory... 收藏

TiNiHf/SiO_(2)/Si shape memory film composites for bidirectional micro actuation

作     者:Sabrina M.Curtis Marian Sielenkamper Gowtham Arivanandhan Duygu Dengiz Zixiong Li Justin Jetter Lisa Hanke Lars Bumke Eckhard Quandt Stephan Wulfinghoff Manfred Kohl 

作者机构:Institute for Materials ScienceKiel University(CAU)KielGermany Materials Science and EngineeringUniversity of MarylandCollege ParkMDUnited States Institute of Microstructure TechnologyKarlsruhe Institute of Technology(KIT)KarlsruheGermany 

出 版 物:《International Journal of Smart and Nano Materials》 (国际智能和纳米材料杂志(英文))

年 卷 期:2022年第13卷第2期

页      面:293-314页

核心收录:

学科分类:08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程(可授工学、理学学位)] 

基  金:Institute for Applied Materials National Science Foundation, NSF, (DGE 1840340) National Science Foundation, NSF Deutsche Forschungsgemeinschaft, DFG 

主  题:Bimorph microactuator NiTiHf bistable actuator shape memory alloy thin films 

摘      要:The martensitic phase transformation in Ti_(40.4)Ni_(48)Hf_(11.6) shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO_(2)/Si *** shape memory properties of magnetron sputtered Ti_(40.4)Ni_(48)Hf_(11.6) films annealed at 635℃-5 min are influenced by film thickness and the underlying *** TiNiHf film thick-ness from 21μm to 110 nm results in the reduction of all characteristic transformation temperatures until a critical thickness is ***,Ti_(40.4)Ni_(48)Hf_(11.6) thin films as low as 220 nm show transfor-mations above room temperature when deposited on SiO_(2) buffer layer,which is of great interest in *** comparison,220 nm films on Si substrates are austenitic at room temperature,and thus not suitable for *** fatigue tests on TiNiHf/SiO_(2)/Si bimorphs demonstrate better functional fatigue characteristics than freestanding films,with an average reduction of 15℃ after 125 cycles,with tempera-ture stabilization *** bi-directional actuation results are promising in the development of bistable actuators within a PMMA/TiNiHf/Si trimorph composite,whereby the additional PMMA layer undergoes a glass transition at 105℃.With the aid of constitutive modeling,a route is elaborated on how bistable actuation can be achieved at micro-to nanoscales by showing favorable thickness combinations of PMMA/TiNiHf/Si composite.

读者评论 与其他读者分享你的观点

用户名:未登录
我的评分