Development of RuS_(2) for near-infrared photodetector by atomic layer deposition and post-sulfurization

作     者：Tatsuya Nakazawa Donghyun Kim Jaehyeok Kim Yohei Kotsugi Taehoon Cheon Seung-Min Chung Soo-Hyun Kim Hyungjun Kim Tatsuya Nakazawa;Donghyun Kim;Jaehyeok Kim;Yohei Kotsugi;Taehoon Cheon;Seung-Min Chung;Soo-Hyun Kim;Hyungjun Kim

作者机构：School of Electrical and Electronic EngineeringYonsei UniversitySeoul03722Korea Isehara Technical CenterMetallic Materials Development DepartmentTANAKA Kikinzoku Kogyo K.KIseharaKanagawa259-1146Japan Institute of Materials TechnologyYeungnam UniversityGyeongsan-si38541GyeongbukKorea Chemical Materials Development DepartmentTANAKA Kikinzoku Kogyo K.KTsukuba Technical CenterIbaraki300-4247Japan School of Materials Science and EngineeringYeungnam UniversityGyeongsan-si38541GyeongbukKorea Center for Core Research FacilitiesDaegu Gyeongbuk Institute of Science&TechnologyDaegu711-873Korea 

出 版 物：《Rare Metals》 (稀有金属（英文版）)

年 卷 期：2022年第41卷第9期

页      面：3086-3099页

核心收录：

学科分类：081702[工学-化学工艺] 080901[工学-物理电子学] 0809[工学-电子科学与技术（可授工学、理学学位）] 0806[工学-冶金工程] 08[工学] 0817[工学-化学工程与技术] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 0805[工学-材料科学与工程（可授工学、理学学位）] 0703[理学-化学] 0803[工学-光学工程] 0702[理学-物理学] 

基　　金：supported by TANAKA Kikinzoku Kogyo K.K.Also by the Basic Science Research Program through the National Research Foundation of Korea(NRF)funded by the Ministry of Education(No.NRF-2021R1I1A1A01057933) 

主　　题：RuS_(2) Sulfurization Atomic layer deposition Photodetector 

摘      要：The chalcogenides of platinum-group metals(PGMs)have been known to be present in minerals and the intermediate products of *** recent years,their applications in various fields,including catalysis,have been *** that certain PGM chalcogenides behave as compound semiconductors,they can be used as materials for *** this study,RuS_(2),featuring a bandgap suitable for near-infrared photodetectors,was prepared by forming Ru on a SiO_(2)/Si substrate via the atomic layer deposition method using[Ru(TMM)(CO)_(3)]as the *** was conducted at 800℃ for 1 h under H_(2)S ***-resolution transmission electron microscopy(HRTEM)and X-ray diffraction(XRD)analysis clearly confirmed that the as-deposited hexagonal close-packed(hcp)Ru transformed to cubic RuS_(2) after *** surface morphologies,chemical states,and electrical and optical properties of RuS_(2) were *** influence of the metallic Ru surface morphology prior to sulfurization on the reaction between Ru and H_(2)S was also *** evaluate the potential of using RuS_(2) as a photodetector,a photodetector was fabricated by forming electrodes on RuS_(2) to measure its photocurrent under near-infrared ***,RuS_(2) was proven to exhibit a short response time(59μs)and generate a photocurrent of 84 nA under near-infrared light at 940 nm.