Polarization Measurement Method Based on Liquid Crystal Variable Retarder(LCVR)for Atomic Thin-Film Thickness

作     者：Yucong Yuan Chengyuan Yao Wanfu Shen Xiaodong Hu Chunguang Hu Yucong Yuan;Chengyuan Yao;Wanfu Shen;Xiaodong Hu;Chunguang Hu

作者机构：State Key Laboratory of Precision Measuring Technology and InstrumentsTianjin UniversityTianjin300072China 

出 版 物：《Nanomanufacturing and Metrology》 (纳米制造与计量（英文）)

年 卷 期：2022年第5卷第2期

页      面：159-166页

核心收录：

学科分类：08[工学] 080502[工学-材料学] 0805[工学-材料科学与工程（可授工学、理学学位）] 

基　　金：supported by National Key Research&Development Program of China(Grant No.2019YFB2005601) the General Program of NSFC(52075383) Major Scientific Research Instrument Development Project of NSFC(61927808) 

主　　题：Atomic thickness thin film Thickness Polarization measurement Brewster angle LCVR 

摘      要：Atomic thickness thin films are critical functional materials and structures in atomic and close-to-atomic scale ***,fast,facile,and highly sensitive precision measurement of atomic film thickness remains *** reflected light has a dramatic phase change and extreme reflectivity considering the Brewster angle,indicating the high sensitivity of the optical signal to film thickness near this ***,the precision polarization measurement method focusing on Brewster angle is vital for the ultrahigh precision characterization of thin films.A precision polarization measurement method based on a liquid crystal variable retarder(LCVR)is proposed in this paper,and a measurement system with a high angular resolution is established.A comprehensive measurement system calibration scheme is also introduced to accommodate ultrahigh precision film thickness *** measurement accuracy to the subnanometer level is *** silicon oxide film samples of different thicknesses were measured around Brewster angle using the self-developed system and compared with a commercial ellipsometer to verify the measurement *** consistency of the thickness measurement results demonstrates the feasibility and robustness of the measurement method and calibration *** study also demonstrates the remarkable potential of the LCVR-based polarization method for atomic film thickness measurement in ultraprecision manufacturing.