Optimization design of an electroabsorption modulator integrated with spot-size converter

作     者：HOU Lian-ping WANG Wei ZHU Hong-liang 

作者机构：National Research Center for Optoelectronic Technology Institute of Semiconductors Chinese Academy of Sciences Beijing 100083 China 

出 版 物：《Optoelectronics Letters》 (光电子快报（英文版）)

年 卷 期：2005年第1卷第2期

页      面：83-87页

学科分类：070207[理学-光学] 07[理学] 0702[理学-物理学] 

基　　金：Supported by the National Natural Science Foundation of China(90101023) and National"973"Project(20000683-1) 

主　　题：优化设计 电吸收调节器 EAM 变流气 波导 

摘      要：A novel 1.55 μm spot-size converter integrated with electroabsorption modulator is designed and fabricated with conventional photolithography and chemical wet etching *** the modulator,we employed a deeply-etched ridge waveguide structure with polyimide on each side of its *** the spot-size converter,we employed a buried double-core structure in which a ridge-based passive waveguide is *** wide and thin passive waveguide is optically combined with a laterally tapered active waveguide to control the mode *** simulation,the figure of merit is 4.17(dB/V/(100 μm)) and the beam divergence angles in the horizontal and vertical directions are as small as 11.2°×13.0°,respectively.