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Study of Thermal Radiation Properties of Pyrolytic Carbon Protective Coatings for Monocrystalline Silicon Furnace

Study of Thermal Radiation Properties of Pyrolytic Carbon Protective Coatings for Monocrystalline Silicon Furnace

作     者:Wei-Wei Cao Bo Zhu Wei Zhao Yong-Wei Wang Yang Chen Xi-Hai Wang 

作者机构:College of Materials Science and EngineeringTianjin Polytechnic University Taishan Sports Industry Group College of Materials Science and EngineeringShandong University Weifang Wuzhou Wind Power Equipment Co.Ltd 

出 版 物:《Journal of Harbin Institute of Technology(New Series)》 (哈尔滨工业大学学报(英文版))

年 卷 期:2013年第20卷第4期

页      面:36-40页

核心收录:

学科分类:08[工学] 0805[工学-材料科学与工程(可授工学、理学学位)] 080502[工学-材料学] 

基  金:Sponsored by the National High Technology Research and Development Program of China(863 Program)(Grant No.2009AA035301) the ChinaPostdoctoral Science Foundation(Grant No.2012M511544) 

主  题:Monocrystalline silicon furnace PyC protective coating Normal spectral emissivity Normal total emissivity Graphite structure 

摘      要:The thermal radiation properties of pyrolytic carbon(PyC)protective coatings for monocrystalline silicon furnace prepared by different processes were *** changes of normal emissivity of carbon materials caused by PyC protective coatings were discussed,and the influence of phase structure and surface appearance on the thermal radiation properties was *** results show that the thermal radiation properties of PyC protective coatings with the wave band of 5-25μm are better than C/C substrate,further,normal spectral emissivity of CVD PyC coating remains basically at 0.85-0.90,and the normal total emissivity can reach0.89,which shows high thermal radiation *** resin PyC coating and CVD PyC coating,the degree of graphitization are 44.53%and 16.28%respectively,and the R value of Raman spectrum are 0.964and 1.384 *** disorder graphite structure of the latter causes various vibration modes,and the spectral emissivity is better,so the thermal radiation property of CVD PyC coating is excellent.A lot of spherical particles exists on the surface of the CVD PyC coating,and the more interface and spacing of particles reduce the number of particles per unit ***,the scattering of thermal radiation is strongly strengthened,and the spectral emissivity is higher.

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