Application of mathematical morphology operation with memristor-based computation-in-memory architecture for detecting manufacturing defects
作者机构：School of Integrated Circuits(SIC)Beijing Innovation Center for Future Chips(ICFC)Tsingfiua UniversityBeijingChina Beijing National Research Center for Information Science and Technology(BNRist)Tsinghua UniversityBeijingChina
出 版 物：《Fundamental Research》 (自然科学基础研究（英文版）)
年 卷 期：2022年第2卷第1期
页 面：123-130页
学科分类：08[工学] 081201[工学-计算机系统结构] 0812[工学-计算机科学与技术（可授工学、理学学位）]
基 金：the National Natural Science Foundation of China(Grants No.92064001,61851404,and 61874169) the IoT Intelligent Microsystem Center of Tsinghua University-China Mobile Joint Research Institute
主 题：Memristor Computation-in-memory Mathematical morphology Defect detection
摘 要：Mathematical morphology operations are widely used in image processing such as defect analysis in semiconductor manufacturing and medical image *** data-intensive applications have high requirements during hardware implementation that are challenging for conventional hardware platforms such as central processing units(CPUs)and graphics processing units(GPUs).Computation-in-memory(CIM)provides a possible solution for highly efficient morphology *** this study,we demonstrate the application of morphology operation with a novel memristor-based auto-detection architecture and demonstrate non-neuromoq)hic computation on a multi-array-based memristor ***-by-pixel logic computations with low parallelism are converted to parallel operations using ***,hardware-implemented computer-integrated manufacturing was used to experimentally demonstrate typical defect detection tasks in integrated circuit(IC)manufacturing and medical image *** addition,we developed a new implementation scheme employing a four-layer network to realize small-object detection with high *** system benchmark based on the hardware measurement results showed significant improvement in the energy efficiency by approximately 358 times and 32 times more than when a CPU and GPU were employed,respectively,exhibiting the advantage of the proposed memristor-based morphology operation.
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