A Predictive Instrument for Sensitive and Expedited Measurement of Ultra-Barrier Permeation

作     者：Jianfeng Wanyan Kun Cao Zhiping Chen Yun Li Chenxi Liu Runqing Wu Xiao-Dong Zhang Rong Chen Jianfeng Wanyan;Kun Cao;Zhiping Chen;Yun Li;Chenxi Liu;Runqing Wu;Xiao-Dong Zhang;Rong Chen

作者机构：State Key Laboratory of Digital Manufacturing Equipment and Technology&School of Mechanical Science and EngineeringHuazhong University of Science and TechnologyWuhan 430074China School of Materials Science and EngineeringHuazhong University of Science and TechnologyWuhan 430074China 

出 版 物：《Engineering》 (工程（英文）)

年 卷 期：2021年第7卷第10期

页      面：1459-1468页

核心收录：

学科分类：0808[工学-电气工程] 08[工学] 0807[工学-动力工程及工程热物理] 080401[工学-精密仪器及机械] 0804[工学-仪器科学与技术] 081102[工学-检测技术与自动化装置] 0811[工学-控制科学与工程] 

基　　金：This work was supported by the National Natural Science Foundation of China(51835005 and 51911540476) the Hubei Provincial Natural Science Foundation of China(2019CFB527) the Hubei Provincial Natural Science Foundation of China for innovative research groups(2020CFA030) the Independent Research and Development Fund of Huazhong University of Science and Technology(HUST)(2019kfyXMBZ025) the State Key Lab of Digital Manufacturing Equipment&Technology(0225100102) 

主　　题：Water vapor permeation Ultra-barrier Predictive model Quadrupole mass spectrometer 

摘      要：The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water *** reliable results have been reported in the range of 10–6 g∙(m^(2)∙d)
1,and there is no standard ultra-barrier for *** detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test period,a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation,detection,and evacuation of the *** reliability was ensured by means of calibration using a standard polymer *** calibration,the lower detection limit for water vapor permeation is in the range of 10–7 g∙(m^(2)∙d)
1,which satisfies the ultra-barrier *** permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results,thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.