A Computational Study of Radio Frequency Atmospheric Pressure Discharge in Nitrogen and Oxygen Mixture Gases
射频氮和氧的混合气体在大气压力排放计算研究作者机构:Key Laboratory of Materials Modification by LaserElectronand Ion Beams(Ministry of Education)School of Physics and Optoelectronic TechnologyDalian University of TechnologyDalian 116024
出 版 物:《Chinese Physics Letters》 (中国物理快报(英文版))
年 卷 期:2013年第30卷第3期
页 面:100-103页
核心收录:
学科分类:02[经济学] 0202[经济学-应用经济学] 0805[工学-材料科学与工程(可授工学、理学学位)] 0704[理学-天文学]
基 金:Supported by the National Natural Science Foundation of China under Grant Nos 11075030,11105065,11275041 the National Basic Research Program of China under Grant Nos 2008CB717801,2008CB787103,2009GB105004,2010GB106002 the Fundamental Research Funds for the Central Universities of China under Grant Nos DUT12ZD(G)01,DUT12ZD201.
摘 要:The characteristics of radio frequency atmospheric pressure discharge in nitrogen and oxygen mixture gases are investigated by using a one-dimensional fluid model.The model consists of equations of particle continuity,Poisson s equation,and the electron energy equation.The effect of the concentrations of O_(2) in N_(2) on the discharge characteristics is analyzed.The results show that when the concentration of O_(2) in N_(2) is less than 12%,as the amount of O_(2) grows,the electron density and the N4+ion density decrease;the main negative particles are electrons.When the concentration of O_(2) in N_(2) is greater than 12%,the electron density and the N_(4)^(+) ion density increase with the increasing admixture of oxygen;the main negative particle is the O^(-) ion.Moreover,the O^(-) ion density,the O_(2)^(+) ion density,the electron temperature and the mixture gases electronegativity increase with growth of O_(2) in the range from 4%to 20%and with density of O_(2) in N_(2).